First-Order Linear Mechatronics Model for Closed-Loop MEMS Disk Resonator Gyroscope

Wang, Hao; Wang, Xiupu; Xie, Jianbing

doi:10.3390/s20226455

Cited by 6 publications

(1 citation statement)

References 26 publications

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“…Thus, for the gyroscope sense mode, typical strategies include the open loop [10], forcerebalance closed loop with quadrature stiffness nulling [11] and force-rebalance closed loop with quadrature force correction [12]. Considering the complex and mutually coupling control loops in the gyroscope system, several advanced control theories including the periodic averaging method [13,14], zero-pole cancellation method [15] and order-reduction linearization method [16] can be adopted to simplify the system design and optimization.…”

Section: Introductionmentioning

confidence: 99%

Effects of both the drive- and sense-mode circuit phase delay on MEMS gyroscope performance and real-time suppression of the residual fluctuation phase error

Wu¹,

Zheng²,

Wang³

et al. 2021

J. Micromech. Microeng.

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This work analyses circuit phase delay for carrier-modulation MEMS capacitive gyroscopes. The temperature-dependent circuit phase delay is a major source of gyroscope output drift, which deteriorates the gyroscope bias instability (BI) and angle random walk (ARW). Effects of both drive-mode and sense-mode circuit phase delay on gyroscope performance when using different signal extraction architectures are analyzed in detail. The online suppression method which combines the so-called modified double sideband (MDSB) extraction architecture in the gyroscope drive mode and closed-loop force-rebalance loop in the sense mode can eliminate the impact of residual fluctuation error of circuit phase delay in real time. When drive-mode circuit phase delay equivalently varies from −20° to 20°, using MDSB decreases the fluctuation of the open-loop zero-rate output (ZRO) by 70% compared to using double sideband (DSB) and by 99.7% with respect to using single sideband (SSB). Meanwhile, improvement for the closed-loop ZRO using MDSB is 92.48% and 94% compared to cases using DSB and SSB, respectively. Furthermore, when the equivalent circuit phase delay of the sense-mode alters from −20° to 20°, ZRO variation for the gyroscope with force rebalanced sense loop and quadrature stiffness nulling loop decreases by 80% in contrast to the case with open loop, which demonstrates the effectiveness of online suppression for circuit phase delay of both the drive-mode and sense-mode. Using the online suppression method, the gyroscope has achieved a BI of 0.16° h−1 and ARW of 0.011° (√h)−1. Furthermore, using the MDSB in the drive mode obtains the best stability compared to using the DSB and SSB as the temperature changes.

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Section: Introductionmentioning

confidence: 99%

Effects of both the drive- and sense-mode circuit phase delay on MEMS gyroscope performance and real-time suppression of the residual fluctuation phase error

Wu¹,

Zheng²,

Wang³

et al. 2021

J. Micromech. Microeng.

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Study of nonlinear vibration of resonant gyroscope based on uncertainty analysis method

Tan²,

Wen³

et al. 2022

Microelectronic Engineering

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A capacitance sensing method with trans-impedance based readout circuit and adaptive filtering for micro-gyro

Liu

Zeng

et al. 2023

Review of Scientific Instruments

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Trans-impedance amplifier (TIA) based capacitance–voltage (C–V) readout circuit is an attractive choice for micro-machined gyroscope for its simplicity and superior performance. In this work, the noise and the C–V gain characteristics of the TIA circuit are analyzed in detail. Then, a TIA based readout circuit with a C–V gain of about 286 dB is designed, and a series of experiments are conducted to test the performance of the circuit. Both the analysis and test results show that T-network TIA should be avoided as far as possible for its poor noise performance. All results also show that there is a signal-to-noise ratio (SNR) limit for the TIA based readout circuit, and the SNR can only be further improved by filtering. Hence, an adaptive finite impulse response filter is designed to further improve the SNR of the sensed signal. For a gyroscope with a peak-to-peak variable capacitance of about 200 aF, a SNR of 22.8 dB can be achieved by the designed circuit and a SNR of 47 dB can be obtained by further adaptive filtering. Finally, the solution presented in this paper achieves a capacitive sensing resolution of 0.9 aF.

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First-Order Linear Mechatronics Model for Closed-Loop MEMS Disk Resonator Gyroscope

Cited by 6 publications

References 26 publications

Effects of both the drive- and sense-mode circuit phase delay on MEMS gyroscope performance and real-time suppression of the residual fluctuation phase error

Effects of both the drive- and sense-mode circuit phase delay on MEMS gyroscope performance and real-time suppression of the residual fluctuation phase error

Study of nonlinear vibration of resonant gyroscope based on uncertainty analysis method

A capacitance sensing method with trans-impedance based readout circuit and adaptive filtering for micro-gyro

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