Multi-Ring Disk Resonator with Elliptic Spokes for Frequency-Modulated Gyroscope

Abstract

In this paper, we report a multi-ring disk resonator with elliptic spokes for compensating the aniso-elasticity of (100) single crystal silicon. The structural coupling between each ring segments can be controlled by replacing the straight beam spokes with the elliptic spokes. The degeneration of two n = 2 wineglass modes could be realized by optimizing the design parameters of the elliptic spokes. The mode-matched resonator could be obtained when the design parameter, aspect ratio of the elliptic spokes was 25/27. The proposed principle was demonstrated by both numerical simulation and experiment. A frequency mismatch as small as 1330 ± 900 ppm could be experimentally demonstrated, which was much smaller than that of the conventional disk resonator, which achieved as high as 30,000 ppm.

A Two-Axis Orthogonal Resonator for Variable Sensitivity Mode Localization Sensing

“…Figure 3 shows the structure of the resonator and the definition of the axes used in this paper. The resonator consists of multiple concentric rings connected by elliptic springs [28]. However, in this paper, two n = 1 modes, which correspond to the ring moving as a whole either horizontally or vertically, as shown in Figure 3b,c, are used.…”