Ellipsometric Investigations of the Refractive Index Depth Profile in PZT Thin Films

Deineka, A.; Jastrabı́k, L.; Suchaneck, G.; Gerlach, Gerald

doi:10.1002/1521-396x(200112)188:4<1549::aid-pssa1549>3.0.co;2-d

Cited by 13 publications

(7 citation statements)

References 14 publications

(21 reference statements)

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“…These results could be associated with the photorefractive effect besides the dispersion in PZT film. Photon-generated carriers were produced in the film and diffused under UV irradiation, leading to the establishment of build-in electric field, which induces the electro-optic effect and subsequently the change of refractive index [36,37,38].…”

Section: Resultsmentioning

confidence: 99%

Thickness Dependence of Ferroelectric and Optical Properties in Pb(Zr0.53Ti0.47)O3 Thin Films

Chen

et al. 2019

Sensors

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As a promising functional material, ferroelectric Pb(ZrxTi1−x)O3 (PZT) are widely used in many optical and electronic devices. Remarkably, as the film thickness decreases, the materials’ properties deviate gradually from those of solid materials. In this work, multilayered PZT thin films with different thicknesses are fabricated by Sol-Gel technique. The thickness effect on its microstructure, ferroelectric, and optical properties has been studied. It is found that the surface quality and the crystalline structure vary with the film thickness. Moreover, the increasing film thickness results in a significant increase in remnant polarization, due to the interfacial layer effect. Meanwhile, the dielectric loss and tunability are strongly dependent on thickness. In terms of optical properties, the refractive index of PZT films increase with the increasing thickness, and the photorefractive effect are also influenced by the thickness, which could all be related to the film density and photovoltaic effect. Besides, the band gap decreases as the film thickness increases. This work is significant for the application of PZT thin film in optical and optoelectronic devices.

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Section: Resultsmentioning

confidence: 99%

Thickness Dependence of Ferroelectric and Optical Properties in Pb(Zr0.53Ti0.47)O3 Thin Films

Chen

et al. 2019

Sensors

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“…The origin of self-polarization depends, to a large extent, on a deposition technology. Reactively sputtered, in situ crystallized PZT thin films are polarized by a negatively charged space charge layer near the bottom electrode [23], which was unintentionally introduced during film deposition [24,25], and which is stable even above the Curie temperature [26]. In Ti-rich films, Zr/Zr + Ti < 0.3, the self-polarization degree determined as the ratio of the pyroelectric coefficients of the unpoled and poled state was nearly 100%, which is sufficient for pyroelectric applications [24].…”

Section: Resultsmentioning

confidence: 99%

Domain populations in lead zirconate titanate thin films of different compositions via piezoresponse force microscopy

Vilarinho

Shvartsman

et al. 2005

Nanotechnology

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Pb(Zr x Ti 1−x )O 3 (PZT) thin films with (111) texture were deposited onto commercially available Pt/Ti/SiO 2 /Si substrates via the sol-gel technique. Piezoforce microscopy (PFM) was then used to analyse the evolution of domain populations as a function of the Zr content x. Domain structures of virgin films, local piezoelectric properties of individual grains and piezoelectric histograms were studied in films with different compositions (x = 0.2-0.6), which cover both the tetragonal and rhombohedral sides of the phase diagram. In films with low Zr content mainly single-domain grains were observed. As the Zr content increased, a larger fraction of polydomain grains was found. The local piezoelectric response measured inside sufficiently big grains indicated that the strongest piezoelectric effect occurs in PZT30/70 (x = 0.3) films. This was attributed to two different effects: high out-of-plane polarization achieved due to the (111) texture and influence of the dielectric constant. In tetragonal films with their lower dielectric constants the electric field seen by a ferroelectric is higher as compared to other compositions, giving rise to an apparent increase of the effective piezoelectric response measured by PFM. The analysis of the domain images indicated that sol-gel derived PZT films are slightly self-polarized near the free surface. With increasing Zr/Ti ratio, the variation of domain populations resulted in reversing the sign of the average piezoelectric response at x ≈ 0.3. It is demonstrated that PFM histograms are extremely sensitive to PZT composition and can be used as a signature of complex domain structures in ferroelectric thin films.

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“…The deposited films are self-polarized by cooling down below the Curie temperature by an internal electric field. This field is generated by a negatively charged space charge layer near the bottom electrode [15] which is stable even above Curie temperature [16]. Semitransparent NiCr top electrodes of a thickness of about 7 nm were deposited by vacuum evaporation.…”

Section: Methodsmentioning

confidence: 99%

UV-INDUCED CHANGES OF THE POLARIZATION PROFILE OF Pb(Zr,Ti)O₃ THIN FILMS

Suchaneck

Lin

Gerlach

et al. 2005

Integrated Ferroelectrics

Self Cite

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Self-polarized lead-enriched Pb(Zr,Ti)O 3 films were deposited in which a fraction of the Zr sites are occupied by Pb 4+ ions. Peculiarities of photo-induced changes in the ferroelectric hysteresis and the pyroelectric coefficient profile of these films were investigated. UV illumination decreases the voltage required to reorient the domains and increases the spontaneous polarization. After illumination switch-off space charge layers of trapped electrons were formed and the switchable polarization was partially suppressed. The localization of the trapped space charges is determined by the light absorption coefficient.

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Ellipsometric Investigations of the Refractive Index Depth Profile in PZT Thin Films

Cited by 13 publications

References 14 publications

Thickness Dependence of Ferroelectric and Optical Properties in Pb(Zr0.53Ti0.47)O3 Thin Films

Thickness Dependence of Ferroelectric and Optical Properties in Pb(Zr0.53Ti0.47)O3 Thin Films

Domain populations in lead zirconate titanate thin films of different compositions via piezoresponse force microscopy

UV-INDUCED CHANGES OF THE POLARIZATION PROFILE OF Pb(Zr,Ti)O₃ THIN FILMS

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Ellipsometric Investigations of the Refractive Index Depth Profile in PZT Thin Films

Cited by 13 publications

References 14 publications

Thickness Dependence of Ferroelectric and Optical Properties in Pb(Zr0.53Ti0.47)O3 Thin Films

Thickness Dependence of Ferroelectric and Optical Properties in Pb(Zr0.53Ti0.47)O3 Thin Films

Domain populations in lead zirconate titanate thin films of different compositions via piezoresponse force microscopy

UV-INDUCED CHANGES OF THE POLARIZATION PROFILE OF Pb(Zr,Ti)O3 THIN FILMS

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UV-INDUCED CHANGES OF THE POLARIZATION PROFILE OF Pb(Zr,Ti)O₃ THIN FILMS