During the last few years, thermopiles have come increasingly under the spotlight of commercial infrared sensing. This growing interest has motivated us to write an overview of micromachined thermopiles. The first part deals with the Seebeck effect and discusses the most important physical parameters with their interactions. We also describe the main noise sources and give a derivation of the figures of merit and their relevance for thermopile detectors. In the second part, a number of material systems, techniques and micromachined structures are discussed on the basis of different examples. We explain the motivation behind miniaturized thermopile detectors and give a functional explanation of physical interrelations. Finally, different applications are presented and discussed in terms of their future potential.
In this review the basic principles of carbon dioxide sensors and their manifold applications in environmental control, biotechnology, biology, medicine and food industry are reported. Electrochemical CO2 sensors based on the Severinghaus principle and solid electrolyte sensors operating at high temperatures have been manufactured and widely applied already for a long time. Besides these, nowadays infrared, non-dispersive infrared and acoustic CO2 sensors, which use physical measuring methods, are being increasingly used in some fields of application. The advantages and drawbacks of the different sensor technologies are outlined. Electrochemical sensors for the CO2 measurement in aqueous media are pointed out in more detail because of their simple setup and the resulting low costs. A detailed knowledge of the basic detection principles and the windows for their applications is necessary to find an appropriate decision on the technology to be applied for measuring dissolved CO2. In particular the pH value and the composition of the analyte matrix exert important influence on the results of the measurements.
Abstract. The calibration of uncooled thermal infrared (IR) cameras to absolute temperature measurement is a time-consuming, complicated process that significantly influences the cost of an IR camera. Temperaturemeasuring IR cameras display a temperature value for each pixel in the thermal image. Calibration is used to calculate a temperature-proportional output signal (IR or thermal image) from the measurement signal (raw image) taking into account all technical and physical properties of the IR camera. The paper will discuss the mathematical and physical principles of calibration, which are based on radiometric camera models. The individual stages of calibration will be presented. After start-up of the IR camera, the non-uniformity of the pixels is first corrected. This is done with a simple two-point correction. If the microbolometer array is not temperature-stabilized, then, in the next step the temperature dependence of the sensor parameters must be corrected. Ambient temperature changes are compensated for by the shutter correction. The final stage involves radiometric calibration, which establishes the relationship between pixel signal and target object temperature. Not all pixels of a microbolometer array are functional. There are also a number of defective, so-called "dead" pixels. The discovery of defective pixels is a multistep process that is carried out after each stage of the calibration process.
In the present work, pH‐sensitive poly(vinyl alcohol)/poly(acrylic acid) (PVA/PAA) blends as well as hydrogels based on poly(N‐isopropylacrylamide) (PNIPAAm), which are sensitive to organic solvent concentration in aqueous solutions, were used in silicon micromachined sensors. A sensitivity of approximately 15 mV/pH was obtained for a pH sensor with a 50 μm thick PVA/PAA hydrogel layer in a pH range above the acid exponent of acrylic acid (pKa=4.7). The output voltage versus pH‐value characteristics and the long‐term signal stability of hydrogel‐based sensors were investigated and the measurement conditions necessary for high signal reproducibility were determined. The influence of the preparation conditions of the hydrogel films on the sensitivity and response time of the chemical and pH sensors is discussed.
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