Electrostatically coupled vibration modes in unimorph complementary microcantilevers

Lebedev, V.; Heidrich, N.; Knöbber, Fabian; Sah, R. E.; Pletschen, W.; Raynor, B.; Polyakov, V. M.; Cimalla, V.; Ambacher, O.

doi:10.1063/1.3697647

Cited by 9 publications

(7 citation statements)

References 11 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Finally, the as-grown AlN layer as well as boron-doped NCD/AlN layer systems were structured into 500 µm circular plates in order to determine the d 33 piezoelectric coefficient of as-grown layers as well as after the NCD growth process using LDV [35]. In figure 4(c), a c-axis orientation of the columnar AlN films is indicated from HRTEM.…”

Section: Characterization Of Ncd/aln Heterostructuresmentioning

confidence: 99%

Piezoelectric actuated micro-resonators based on the growth of diamond on aluminum nitride thin films

et al. 2012

View full text Add to dashboard Cite

Unimorph heterostructures based on piezoelectric aluminum nitride (AlN) and diamond thin films are highly desirable for applications in micro- and nanoelectromechanical systems. In this paper, we present a new approach to combine thin conductive boron-doped as well as insulating nanocrystalline diamond (NCD) with sputtered AlN films without the need for any buffer layers between AlN and NCD or polishing steps. The zeta potentials of differently treated nanodiamond (ND) particles in aqueous colloids are adjusted to the zeta potential of AlN in water. Thereby, the nucleation density for the initial growth of diamond on AlN can be varied from very low (10(8) cm(-2)), in the case of hydrogen-treated ND seeding particles, to very high values of 10(11) cm(-2) for oxidized ND particles. Our approach yielding high nucleation densities allows the growth of very thin NCD films on AlN with thicknesses as low as 40 nm for applications such as microelectromechanical beam resonators. Fabricated piezo-actuated micro-resonators exhibit enhanced mechanical properties due to the incorporation of boron-doped NCD films. Highly boron-doped NCD thin films which replace the metal top electrode offer Young's moduli of more than 1000 GPa.

show abstract

Section: Characterization Of Ncd/aln Heterostructuresmentioning

confidence: 99%

Piezoelectric actuated micro-resonators based on the growth of diamond on aluminum nitride thin films

et al. 2012

View full text Add to dashboard Cite

show abstract

“…1, right). N-O bonds caused by adsorbates from the residual gas can be ruled out because their binding energy would have a lower BE (typically ~397.4 eV) [29,30] and an uptake of oxygen during the experiment is not detected. A possible explanation for this feature according to the measured BE and the deposition of K is the formation of potassium nitrogen bonds at the surface.…”

mentioning

confidence: 99%

Impact of potassium and water on the electronic properties of InN(0001) surfaces

Reiß

Eisenhardt

Krischok

et al. 2014

Phys. Status Solidi C

View full text Add to dashboard Cite

In this work we investigate the interaction of potassium and water with 2×2 reconstructed InN(0001) surfaces prepared by plasma‐assisted molecular beam epitaxy. The influence of adsorbate‐substrate‐interaction on surface properties is characterized in‐situ by photoelectron spectroscopy. Potassium exposure leads to a strong reduction in the work function Φ to 1.6 eV revealing a charge transfer from the adsorbate to the InN surface. In parallel, a reduction of the surface downward band bending by 0.2 eV and hence a reduced electron accumulation density is observed. While interaction of water with clean InN(0001)‐2×2 surfaces induces only minor changes in the surface band bending, water adsorption at potassium covered InN(0001) leads to a reversal of the K‐induced reduction in surface band bending and a slight increase of Φ to 2.4 eV. These results show that surrounding water modifies the interaction of potassium with InN(0001) surfaces. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

show abstract

“…In order to estimate the enhancement in mechanical properties of unimorphs due to the insertion of the NCD:B electrode/elastic layer, the properties of the NCD:B/AlN/Cr resonators were compared to those of the single-layer AlN [20] and NCD [21] beams along with the AlN/Mo/AlN tuneable resonator system [22] reported earlier. The latter is the reference system for the demonstrated resonators, which have both the AlN elastic layer and the Ni top-electrode replaced by the NCD:B film with a dual functionality.…”

Section: Discussionmentioning

confidence: 99%

Enhanced mechanical performance of AlN/nanodiamond micro-resonators

Heidrich¹,

Iankov²,

Hees³

et al. 2013

J. Micromech. Microeng.

View full text Add to dashboard Cite

Micro electromechanical systems are a matter of intense research pursuing to replace silicon and III–V semiconductor-based components in prospective radio frequency communication devices. Due to their unique material properties, microstructures combining doped nano-crystalline diamond (NCD) and AlN thin films are promising for piezo-actuated microsystems in order to increase operating frequencies. In this work, single and doubly clamped unimorph NCD-on-AlN micro-resonators were fabricated and then characterized by laser vibrometry towards their flexural resonant frequencies in the range of 0.1–20 MHz to deduce their mechanical properties. Enhancements in the structural properties of an AlN piezo-actuator united with an advanced elasticity of nano-diamond electrode lead to superior mechanical parameters of the resulting unimorphs. These allow for the fabrication of flexural resonant microsystems with a potential to extend the operating frequencies well above 1 GHz.

show abstract

Electrostatically coupled vibration modes in unimorph complementary microcantilevers

Abstract: Inducing bistability with local electret technology in a microcantilever based non-linear vibration energy harvester

Cited by 9 publications

References 11 publications

Piezoelectric actuated micro-resonators based on the growth of diamond on aluminum nitride thin films

Piezoelectric actuated micro-resonators based on the growth of diamond on aluminum nitride thin films

Impact of potassium and water on the electronic properties of InN(0001) surfaces

Enhanced mechanical performance of AlN/nanodiamond micro-resonators

Contact Info

Product

Resources

About