Electron-probe: tool for failure analysis for semiconductor devices

Kormàny, T.; Nagy, Gábor

doi:10.1016/0042-207x(72)90025-5

Vacuum

1972

DOI: 10.1016/0042-207x(72)90025-5

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Electron-probe: tool for failure analysis for semiconductor devices

T. Kormàny

Gábor Nagy

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1973

1975

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Cited by 2 publications

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Die Lösung von Halbleiterproblemen mit der Elektronenstrahlmikrosonde

Kormàny¹,

Nagy²

1973

Cryst Res and Technol

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Die Losung von Halbleiterproblemen mit der Elektronenstrahlmikrosonde l )Mit einer Farbtafel I Es wird ein aberblick gegeben uber die Anwendung der Elektronenstrahlmikrosonde zur chemischen Analyse von Halbleitermaterialien und Halbleiterbauelementen sowie zur Untersuchung von pn-tfbergiingen. Die Untersuchungsergebnisse beziehen sich auf den Nachweis von Ausscheidungsvorgiingen der Verunreinigungen und deren Auswirkung auf die elektrischen Parameter der Halbleiterbauelemente. Es wird gezeigt, daB die Anwendung der Induzierten-Stromsignal-Methode die Abbildung der p-n-Tfbergiinge und den Nachweis verschiedener Fehlermechanismen ermoglicht.The use of electron beam X-ray microprobe testing in the chemical analysis of semiconductor materials and devices and also in the measurement of the p-n junction electrical parameters is reported. Results of analyses are presented on the precipitation of impurities and on various effects of the contaminants on device parameters. It is shown that the display of p-n junction structure and also the detection of failure types is possible by using the induced current mode method.

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Die Lösung von Halbleiterproblemen mit der Elektronenstrahlmikrosonde

Kormàny¹,

Nagy²

1973

Cryst Res and Technol

Self Cite

View full text Add to dashboard Cite

show abstract

Results of a 160 × 106 device-hour reliability assessment and failure analysis of TTL SSI integrated circuits, part 2 survey of dominant IC failure mechanisms and analysis of failure causes

Kemeny¹,

Kalmár²,

Stefániay

1975

Microelectronics Reliability

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Electron-probe: tool for failure analysis for semiconductor devices

Cited by 2 publications

References 8 publications

Die Lösung von Halbleiterproblemen mit der Elektronenstrahlmikrosonde

Die Lösung von Halbleiterproblemen mit der Elektronenstrahlmikrosonde

Results of a 160 × 106 device-hour reliability assessment and failure analysis of TTL SSI integrated circuits, part 2 survey of dominant IC failure mechanisms and analysis of failure causes

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