Electron irradiation-enhanced water and hydrocarbon adsorption in EUV lithography devices

Al-Ajlony, Al-Montaser Bellah A.; Kanjilal, A.; Catalfano, M.; Harilal, S. S.; Hassanein, A.

doi:10.1016/j.apsusc.2013.10.167

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Evolution Of Electron Emission Yield During the Cleaning Process1

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“…To explain the last results two reasons can be advocated. The first one is that the irradiation could increase the kinetic of the contamination deposition [20]. The second possible reason is that the broken and excited hydrocarbons molecules by the Ar bombardment are relaxed and recombined slowly between two etching steps.…”

Section: Evolution Of Electron Emission Yield During the Cleaning Processmentioning

confidence: 99%

Investigation of the electron emission properties of silver: From exposed to ambient atmosphere Ag surface to ion-cleaned Ag surface

Gineste

Belhaj

Teyssèdre

et al. 2015

Applied Surface Science

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Electron emission properties of materials are highly dependent to the surface and the first nanometres subsurface. Technical materials, i.e used within applications are ordinarily exposed to atmosphere, which interacts with the surface. The contamination layer building up at the surface of materials and/or oxidation layer affects dramatically the electron emission proprieties. In this paper, starting from 99.99% pure silver sample, exposed 4 years to ambient atmosphere, we monitored the variations of the electron emission properties and the surface composition during step by step ion etching procedure.

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Section: Evolution Of Electron Emission Yield During the Cleaning Processmentioning

confidence: 99%

Investigation of the electron emission properties of silver: From exposed to ambient atmosphere Ag surface to ion-cleaned Ag surface

Gineste

Belhaj

Teyssèdre

et al. 2015

Applied Surface Science

View full text Add to dashboard Cite

show abstract

Monte Carlo simulation of secondary electron emission from an N2-adsorbed layer on a Cu surface

Zhang

et al. 2020

Results in Physics

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Extreme UV induced dissociation of amorphous solid water and crystalline water bilayers on Ru(0001)

Liu¹,

Sturm²,

Lee³

et al. 2016

Surface Science

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Electron irradiation-enhanced water and hydrocarbon adsorption in EUV lithography devices

Cited by 4 publications

References 1 publication

Investigation of the electron emission properties of silver: From exposed to ambient atmosphere Ag surface to ion-cleaned Ag surface

Investigation of the electron emission properties of silver: From exposed to ambient atmosphere Ag surface to ion-cleaned Ag surface

Monte Carlo simulation of secondary electron emission from an N2-adsorbed layer on a Cu surface

Extreme UV induced dissociation of amorphous solid water and crystalline water bilayers on Ru(0001)

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