2010 IEEE International Reliability Physics Symposium 2010
DOI: 10.1109/irps.2010.5488747
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Electromigration mechanisms in Cu nano-wires

Abstract: In this article, we propose a new drift velocity technique to measure electromigration at temperatures of 125 o C to directly assess electromigration transport at use conditions. We present measurements of the temperature of the drift velocity of Cu conductors with small and large polycrystalline grain size. A significant grain size dependence of drift velocity was found, indicating a large flux of atoms through grain boundaries when the fraction of polycrystalline segments is a significant fraction of the con… Show more

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Cited by 9 publications
(1 citation statement)
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“…This is the change in kinetic energy at both electrons and metal atoms which cause the motion of the ions within the conducting element and this leads to an increase in current density. This is due to continuous reduction of metal wires with a corresponding rise in the wire resistance [28,[120][121][122][123][124]. The interaction between electrons and metal atoms results to voids and hillocks [121,124].…”
Section: Electro-migration (Em)mentioning
confidence: 99%
“…This is the change in kinetic energy at both electrons and metal atoms which cause the motion of the ions within the conducting element and this leads to an increase in current density. This is due to continuous reduction of metal wires with a corresponding rise in the wire resistance [28,[120][121][122][123][124]. The interaction between electrons and metal atoms results to voids and hillocks [121,124].…”
Section: Electro-migration (Em)mentioning
confidence: 99%