Electromagnetic cantilever reference for the calibration of optical nanodisplacement systems

Majstrzyk, Wojciech; Mognaschi, Maria Evelina; Orłowska, Karolina; Barba, Paolo Di; Sierakowski, Andrzej; Dobrowolski, Ryszard; Grabiec, P.; Gotszalk, Teodor

doi:10.1016/j.sna.2018.09.016

Cited by 12 publications

(17 citation statements)

References 30 publications

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“…In the open-loop test, the quality factor of the piezoelectric cantilever resonator is 1411.2, therefore, the static tip displacement is 1.62 nm. Back to the proposed model, let the applied voltage be the drive voltage, that is 0.2 V. Substituting the geometry and material parameters to (1)(2)(3)(4)(5)(6)(7)(8)(9)(10)(11)(12)(13)(14)(15)(16)(17)(18), the static tip displacement is 1.88 nm, which is larger than the measured result. The reason is that there is a feedthrough capacitor in the resonator [32], which will affect the output current.…”

Section: Measurements and Resultsmentioning

confidence: 91%

“…For the i-th layer film, Hooke's law gives (3) where , , and are the stress, Young's modulus, and strain of the i-th layer film. The strain can be written as (4)…”

Section: Assumptions and Theoretical Basis Of The Modelmentioning

confidence: 99%

“…The piezoelectric cantilever is one of the most important structures for micro-electro-mechanical system (MEMS) application and it has been used in atomic force microscopes, chemical sensors and biosensors, radio frequency (RF) switches, photon detectors, micromirrors, and energy harvesters [ 1 , 2 , 3 , 4 , 5 , 6 , 7 ]. Tip displacement and resonance frequency are two important characters of the piezoelectric cantilever, especially when setting the height of the cantilever in the RF switch [ 8 ] and tuning the resonance frequency of the energy harvester that matches the ambient vibrating frequency for improving the power efficiency [ 4 ].…”

Section: Introductionmentioning

confidence: 99%

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Modeling the Piezoelectric Cantilever Resonator with Different Width Layers

Liu

Chen

Zou

2020

Sensors

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The piezoelectric cantilever resonator is used widely in many fields because of its perfect design, easy-to-control process, easy integration with the integrated circuit. The tip displacement and resonance frequency are two important characters of the piezoelectric cantilever resonator and many models are used to characterize them. However, these models are only suitable for the piezoelectric cantilever with the same width layers. To accurately characterize the piezoelectric cantilever resonators with different width layers, a novel model is proposed for predicting the tip displacement and resonance frequency. The results show that the model is in good agreement with the finite element method (FEM) simulation and experiment measurements, the tip displacement error is no more than 6%, the errors of the first, second, and third-order resonance frequency between theoretical values and measured results are 1.63%, 1.18%, and 0.51%, respectively. Finally, a discussion of the tip displacement of the piezoelectric cantilever resonator when the second layer is null, electrode, or silicon oxide (SiO2) is presented, and the utility of the model as a design tool for specifying the tip displacement and resonance frequency is demonstrated. Furthermore, this model can also be extended to characterize the piezoelectric cantilever with n-layer film or piezoelectric doubly clamped beam.

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Section: Measurements and Resultsmentioning

confidence: 91%

“…For the i-th layer film, Hooke's law gives (3) where , , and are the stress, Young's modulus, and strain of the i-th layer film. The strain can be written as (4)…”

Section: Assumptions and Theoretical Basis Of The Modelmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Modeling the Piezoelectric Cantilever Resonator with Different Width Layers

Liu

Chen

Zou

2020

Sensors

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show abstract

“…The actuation precision and reliability were the main reasons, why the electromagnetic cantilevers were successfully applied in SPM [ 12 , 13 ]. In all these investigations the cantilever deflection was determined metrologically (in other words quantitatively), which is of significant importance for investigations of the interactions at a scanning probe microscopy tip.…”

Section: Introductionmentioning

confidence: 99%

Optimal Design of Electromagnetically Actuated MEMS Cantilevers

Barba

Gotszalk

Majstrzyk

et al. 2018

Sensors

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In this paper we present the numerical and experimental results of a design optimization of electromagnetic cantilevers. In particular, a cost-effective technique of evolutionary computing enabling the simultaneous minimization of multiple criteria is applied. A set of optimal solutions are subsequently fabricated and measured. The designed cantilevers are fabricated in arrays, which makes the comparison and measurements of the sensor properties reliable. The microfabrication process, based on the silicon on insulator (SOI) technology, is proposed in order to minimize parasitic phenomena and enable efficient electromagnetic actuation. Measurements on the fabricated prototypes assessed the proposed methodological approach.

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“…The actuation precision and reliability were the main reasons, why the electromagnetic cantilevers were successfully applied in Scanning Probe Microscopy (SPM) [12,13]. In all these investigations the cantilever deflection was determined metrologically (in other words quantitavely) which is of huge importance for the investigations of the interactions at a scanning probe microscopy tip.…”

Section: Introductionmentioning

confidence: 99%

Optimal design of electromagnetically actuated MEMS cantilevers

Barba¹,

Gotszalk²,

Majstrzyk³

et al. 2018

Preprint

Self Cite

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In this paper we present the numerical and experimental results of a design optimization of electromagnetic cantilevers. In particular, a cost-effective technique of evolutionary computing enabling the simultaneous minimization of multiple criteria is applied. A set of optimal solutions are subsequently fabricated and measured. The designed structures are fabricated in arrays, which makes the comparison and measurements of the sensor properties reliable. The microfabrication process, based on the silicon on insulator (SOI) technology, is proposed in order to minimize parasitic phenomena and enable efficient electromagnetic actuation. Measurements on the fabricated prototypes assessed the proposed methodological approach.

show abstract

Electromagnetic cantilever reference for the calibration of optical nanodisplacement systems

Cited by 12 publications

References 30 publications

Modeling the Piezoelectric Cantilever Resonator with Different Width Layers

Modeling the Piezoelectric Cantilever Resonator with Different Width Layers

Optimal Design of Electromagnetically Actuated MEMS Cantilevers

Optimal design of electromagnetically actuated MEMS cantilevers

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