Electromagnetic actuation and MOS-transistor sensing for CMOS-integrated micromechanical resonators

Lange, D.; Hagleitner, Christoph; Herzog, Christian; Brand, Oliver; Baltes, H.

doi:10.1016/s0924-4247(02)00307-2

Cited by 42 publications

(24 citation statements)

References 19 publications

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“…6 and Refs. [30,31]. The vibration of the magnetically excited cantilever is detected by a set of four stress-sensitive MOS transistors (two transistor gates parallel to the cantilever axis, which are severely deformed, and two gate regions perpendicular to the cantilever axis, which are hardly deformed) in a Wheatstone bridge configuration located at the cantilever base, which are biased in a linear region.…”

Section: Resonant Cantilever and Feedback Circuitrymentioning

confidence: 99%

Monolithic CMOS multi-transducer gas sensor microsystem for organic and inorganic analytes

Li¹,

Vancura²,

Barrettino³

et al. 2007

Sensors and Actuators B: Chemical

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Section: Resonant Cantilever and Feedback Circuitrymentioning

confidence: 99%

Monolithic CMOS multi-transducer gas sensor microsystem for organic and inorganic analytes

Li¹,

Vancura²,

Barrettino³

et al. 2007

Sensors and Actuators B: Chemical

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“…Regarding the first point, by defining an output voltage V out = o ξ 1 (t), it is possible to find the coupling parameter o , by making an analysis for small signals of the Wheatstone bridge [7]:…”

Section: Behavioural Model Of the Resonant Cantilevermentioning

confidence: 99%

A Behavioural Model of Resonant Cantilevers for Chemical Sensing

Paci

Kirstein

Vancura

et al. 2005

Analog Integr Circ Sig Process

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We present a model for the behavioural description of resonant cantilevers for chemical sensing. This model is well suited to be implemented in an analog behavioural description language like Verilog-A to enable simulations of the cantilever devices together with integrated electronic circuits. The model is based on the assumption that the resonant cantilever can be described as a plate, with three free and one clamped end; we suppose the damping force acting on the structure is due to air friction and to the viscoelastic behaviour of the polymer used as sensitive layer. We have validated the model by modal FEM analysis (ANSYS TM ) and by measurements with a dynamic signal analyzer (DSA).Simulations with the Spectre TM circuit simulator, including the cantilever device and integrated feedback electronics, have been carried out and show good agreement with the measured transient behaviour of the cantilever devices.

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“…It has been used in conjunction with thermal actuation effectively for various applications in the past [4,9,10] and has obvious advantages in terms of simplicity in design and manufacturing. Micro-cantilevers can be excited to vibrate using several techniques such as using the bi-morph effect [5,11], base excitation [12], electrostatic [13,14] or electromagnetic [15] body forces. Using bimorph effect has been an advantageous method along with thermal actuation [2,5], while the advantages of base excitation as thermal actuator has not been explored to a sufficient extent.…”

Section: Introductionmentioning

confidence: 99%

Robust Design of Thermally Actuated Micro-Cantilever Using Numerical Simulations

Komeili¹,

Menon²

2016

Int. j. simul. model.

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Dynamic behaviour of a micro-cantilever beam under periodic electro-thermal loading is studied in this paper. For certain applications the beam is required to vibrate at a particular frequency. Modal analysis using 3D finite element is used in order to find the geometrical parameters that makes fundamental frequency of the beam match the required frequency. Then non-linear dynamic thermoelastic analysis is conducted on the system to analyse the time-history (transient) behaviour of the beam and record its tip displacement. However, due to uncertainties and non-repeatabilities that are inherent properties of the system along with those associated with the manufacturing, final product is likely to have deviations from these estimated values (fundamental frequency and tip displacement). Thus, choosing a nominal (desired) design and studying the deviation in natural frequency and tip displacement via 2 k factorial Design-of-Experiments (DOE), effect of uncertainties on the overall performance of the system is investigated. This allows finding the significance of individual parameters on the overall robustness of the design as well as potential interactions between various parameters. Finally, the expected behaviour of the micro-cantilever and its robustness to design and implementation uncertainties are elaborated and statements for robust design of this system are made.

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Electromagnetic actuation and MOS-transistor sensing for CMOS-integrated micromechanical resonators

Cited by 42 publications

References 19 publications

Monolithic CMOS multi-transducer gas sensor microsystem for organic and inorganic analytes

Monolithic CMOS multi-transducer gas sensor microsystem for organic and inorganic analytes

A Behavioural Model of Resonant Cantilevers for Chemical Sensing

Robust Design of Thermally Actuated Micro-Cantilever Using Numerical Simulations

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