2016
DOI: 10.2507/ijsimm15(3)2.340
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Robust Design of Thermally Actuated Micro-Cantilever Using Numerical Simulations

Abstract: Dynamic behaviour of a micro-cantilever beam under periodic electro-thermal loading is studied in this paper. For certain applications the beam is required to vibrate at a particular frequency. Modal analysis using 3D finite element is used in order to find the geometrical parameters that makes fundamental frequency of the beam match the required frequency. Then non-linear dynamic thermoelastic analysis is conducted on the system to analyse the time-history (transient) behaviour of the beam and record its tip … Show more

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Cited by 6 publications
(3 citation statements)
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“…Cantilever design follows the finite element analysis done to investigate the dynamic behavior of a micro-cantilever that is transversely excited at its base using a free-standing metallic actuator that is expanding and contracting due to thermal cycles, reported in our previous works [20][21][22][23][24]. Figure 1 shows a three-dimensional (3D) model of the thermal actuator, dual-clad optical fiber, and fiber cantilever, mounted in the bore of a hypodermic needle.…”
Section: Actuator Design and Fabrication Processmentioning
confidence: 99%
“…Cantilever design follows the finite element analysis done to investigate the dynamic behavior of a micro-cantilever that is transversely excited at its base using a free-standing metallic actuator that is expanding and contracting due to thermal cycles, reported in our previous works [20][21][22][23][24]. Figure 1 shows a three-dimensional (3D) model of the thermal actuator, dual-clad optical fiber, and fiber cantilever, mounted in the bore of a hypodermic needle.…”
Section: Actuator Design and Fabrication Processmentioning
confidence: 99%
“…Due to their exciting properties, nanowires are promising candidates for detecting nano-objects with high sensitivity, and also they can be potentially employed in several fields, such as measurement systems [1,2], Micro/Nanoelectromechanical Systems (M/NEMS) [3], biological or gas sensing devices [4], flexible electronics and renewable energy technologies [5], integrated Shape Memory Alloy (SMA) [6], resonators and actuators [7,8] and multifunctional NEMSs.…”
Section: Introductionmentioning
confidence: 99%
“…This acts as a base excitation for the beam. Komeili and Menon [21,22] studied the response of micro-cantilever beam to thermal cycles at its base, along with sensitivity analysis on the system, using Finite Element method. Later on, they showed an analytical model for a 2 dimensional micro-cantilever excited at its base [23].…”
Section: Introductionmentioning
confidence: 99%