Monolithic CMOS multi-transducer gas sensor microsystem for organic and inorganic analytes

Li, Y.; Vancura, C.; Barrettino, Diego; Gräf, M.; Hagleitner, Christoph; Kummer, A.; Zimmermann, Martín; Kirstein, K.-U.; Hierlemann, Andreas

doi:10.1016/j.snb.2007.03.035

Cited by 29 publications

(14 citation statements)

References 38 publications

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“…Only a few cases of chips combining sensors and control electronics have been reported so far [13][14][15][16][17]. The electronics includes, e.g., temperature controllers, driving and readout circuitry for sensors, signal-conditioning units, and, in some cases, a first-stage data processing module or embedded data transmission interface.…”

Section: Introductionmentioning

confidence: 99%

“…The electronics includes, e.g., temperature controllers, driving and readout circuitry for sensors, signal-conditioning units, and, in some cases, a first-stage data processing module or embedded data transmission interface. The sensor is realized by the deposition of a thick nanocrystalline metal oxide material, commonly SnO 2 [13][14][15][16], or a polymeric sensitive layer [17] upon a micromachined structure. At present, one of the most common micromachined components for gas sensors is the so-called microhotplate, consisting of a suspended membrane upon which one or two heaters are integrated [18,19].…”

Section: Introductionmentioning

confidence: 99%

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An integrated CMOS sensing chip for NO2 detection

Barillaro

Strambini

2008

Sensors and Actuators B: Chemical

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

An integrated CMOS sensing chip for NO2 detection

Barillaro

Strambini

2008

Sensors and Actuators B: Chemical

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“…Li et al presented a very flexible monolithically integrated multitransducer array in LSI technology for the detection of organic and inorganic gases [34]. The system comprises two polymer-based sensor arrays based on capacitive and gravimetric transducers (magnetically actuated cantilevers), a temperature sensor, a metal-oxide sensor array located on micro-hotplates, the respective driving and signal processing electronics, and a digital communication interface.…”

Section: Higher Order Devices: Lsi Chemical Multisensor Systemsmentioning

confidence: 99%

Integration of Chemical Sensors with LSI Technology — History and Applications —

Tixier‐Mita

Takahashi

Toshiyoshi

2012

IEICE Trans. Electron.

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Chemical sensors are one of the oldest fields of research closely related to the semiconductor technology. From the Ion-Sensitive Field-Effect Transistors (ISFET) in the 70's, through Micro-Electro-Mechanical-System (MEMS) sensors from the end of the 80's, chemical sensors are combining in the 90's MEMS technology with LSI intelligence to devise more selective, sensitive and autonomous devices to analyse complex mixtures. A brief history of chemical sensors from the ISFET to the nowadays LSI integrated sensors is first detailed. Then the states-of-the-art of LSI integrated chemical sensors and their wide range of applications are discussed. Finally the authors propose a brand-new usage of integrated wireless MEMS sensors for remote surveillance of chemical substances, such as food-industry or pharmaceutical products, that are stored in closed environment like a bottle, for a long period. In such environment, in-situ analyse is necessary, and electrical cables, for energy supply or data transfer, cannot be used. Thanks to integrated MEMS, an autonomous long-term in-situ quality deterioration tracking system is possible.

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“…CMOS-compatible capacitive gas sensors consisting of a silicon capacitor with a specific sensing layer have been widely studied [22,[24][25][26][27]. Also, recently some research groups have expanded the field of capacitive gas sensors to foil substrate, maintaining the use of standard technology for patterning [28,29].…”

Section: Introductionmentioning

confidence: 99%