Crystalline
thin films of cuprous selenide (Cu2Se) were
electrodeposited at room temperature from an aqueous solution containing
elemental precursors for Cu and Se, using a potential pulse version
of atomic layer deposition. Cyclic voltammetry was used to estimate
Anodic and Cathodic cycle potentials for the formation of Cu2Se, which were then examined to systematically optimize the cycle.
Electron probe microanalysis was used to follow the Cu/Se atomic ratios
as a function of the cycle parameters, and X-ray diffraction was used
to investigate deposit structure: polycrystalline orthorhombic Cu2Se, with some cubic. Film thicknesses, from spectroscopic
ellipsometry, were shown to be proportional to the number of cycles
performed (0.02 nm/cycle), and scanning electron microscopy suggested
that the deposits were consistent with layer-by-layer growth as a
function of the number of cycles.