1992
DOI: 10.1063/1.350844
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Electro-optical effect in aluminum nitride waveguides

Abstract: We fabricated thin optical layers in aluminum nitride by magnetron sputtering. Using the techniques of integrated optics, we characterized the layers and we determined the electro-optic coefficients of AlN: r13 = 0.67 pm/V and r33 = −0.59 pm/V.

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Cited by 46 publications
(31 citation statements)
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“…These theoretical values are all less than the measured values of 3.68 and 3.95 pm/V. Moreover, the measured γ 41 of the cBN crystal is also larger than the linear EO coefficients of GaN [15] , AlN [16] , GaP, and GaAs. These EO coefficients are listed and compared in Table 2.…”
Section: -2mentioning
confidence: 41%
See 1 more Smart Citation
“…These theoretical values are all less than the measured values of 3.68 and 3.95 pm/V. Moreover, the measured γ 41 of the cBN crystal is also larger than the linear EO coefficients of GaN [15] , AlN [16] , GaP, and GaAs. These EO coefficients are listed and compared in Table 2.…”
Section: -2mentioning
confidence: 41%
“…AlN C6V γ13 = 0.67, γ33 = −0.59 [16] GaN C 6V γ 13 = 0.57 ± 0.11, γ 33 = 1.91 ± 0.35 [15] GaP T d γ41 = 0.97 [14] GaAs T d γ 41 = 1.6 [14] very promising EO material. In addition, the measuring method of the linear EO coefficient adopted in this letter is very convenient and feasible as it is unnecessary to measure the absolute intensity of the probing beam.…”
mentioning
confidence: 99%
“…AlN has been used for second harmonic generation (SHG) and electro-optic devices based on its χ (2) effect (d 33 = 1-3 × 10 −23 C/V 2 ) [33][34][35][36][37][38]. Unlike SiN or SiO2, AlN has both second (χ (2) ) and third order (χ (3) ) optical nonlinearities due to its non-centrosymmetric crystal structure.…”
Section: Introductionmentioning
confidence: 99%
“…Porém seu estreito bandgap (1,4ev) dificulta sua aplicação em comprimentos de onda de luz no visível devido ao efeito de portadores livres (Adachi et al, 1993). Um outro material que tem sido bastante utilizado como modulador óptico, devido a suas propriedades ópticas e mecânicas, é o niobatio de lítio (LiNbO3) (Lawrence, 1993) (Chen, Wood e Reano, 2013) (Guarino et al, 2007) (Chen et al, 2014), que possui um coeficiente eletro-óptico alto (r33=33pm/V); no entanto o LiNbO3 precisa de um processo de fabricação complexo e pouco compatível com a tecnologia CMOS (Weigel et al, 2016 (Gräupner et al, 1992), fazendo dele um bom candidato para ser utilizado em circuitos opto-mecânicos.…”
Section: Guias De Onda Utilizando Alnunclassified
“…Outro fator muito relevante do AlN é que apresenta birrefringência (Yamashita et al, 1979) e efeito eletro-óptico (r33, r13~1 pm/V) (Gräupner et al, 1992). A birrefringência (Shokhovets et al, 2003) é uma característica física do meio por onde a luz se propaga e está fundamentada nas mudanças do índice de refração com os diferentes modos de propagação (transversal e longitudinal).…”
Section: Capítulo 1 -Introduçãounclassified