DOI: 10.11606/t.3.2017.tde-12072017-085316
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Produção e caracterização de filmes de nitreto de alumínio e sua aplicação em guias de onda tipo pedestal.

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“…Acetone and isopropanol were used to clean the substrate and get rid of any contamination on the surface. After pre-depositing AlN for an additional 5 min, the deposition power and gas ratio of the films were adjusted based on previous work (Armas Alvarado, 2017), as shown in Table 4.3. followed by a 60-minute deposit period.…”
Section: Sensor Fabricationmentioning
confidence: 99%
“…Acetone and isopropanol were used to clean the substrate and get rid of any contamination on the surface. After pre-depositing AlN for an additional 5 min, the deposition power and gas ratio of the films were adjusted based on previous work (Armas Alvarado, 2017), as shown in Table 4.3. followed by a 60-minute deposit period.…”
Section: Sensor Fabricationmentioning
confidence: 99%