Electro-optic integration of embedded electrodes and waveguides in LiNbO_3 using a femtosecond laser

Liao, Yang; Xu, Jian; Cheng, Ya; Zhou, Zhiliang; He, Fei; Sun, Haiyi; Song, Juan; Wang, Xinshun; Xu, Zhizhan; Sugioka, Koji; Midorikawa, Katsumi

doi:10.1364/ol.33.002281

Cited by 86 publications

(64 citation statements)

References 15 publications

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“…This is, indeed, in accordance with previous works reporting on the nonlinear properties of ultrafast laser inscribed WGs in nonlinear crystals. [8][9][10][11] The unexpected increment of the SH back intensity observed at damage tracks has been tentatively attributed ͑in accordance with previous works͒ to the presence in those volumes of a defect-assisted back-scattering enhancement. 12 Thus, the confocal images of Fig.…”

supporting

confidence: 87%

Self-frequency-doubling of ultrafast laser inscribed neodymium doped yttrium aluminum borate waveguides

Dong

Mendívil

Cantelar

et al. 2011

Applied Physics Letters

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Buried channel optical waveguides, supporting orthogonal polarizations, have been fabricated in a neodymium doped yttrium aluminum borate nonlinear laser crystal by ultrafast laser inscription following the so-called "double line" approach. Confocal fluorescence and second harmonic imaging experiments have revealed that the original fluorescence and nonlinear properties have been not deteriorated by the waveguide inscription procedure. Preliminary laser experiments have shown the ability of the fabricated structures for green laser light generation under 808 nm optical pumping by self-frequency-doubling of the 1.06 m laser line of neodymium ions. © 2011 American Institute of Physics. ͓doi:10.1063/1.3584852͔Among the multifunctional optical systems currently proposed as building-blocks of integrated devices, selffrequency-converted ͑SFC͒ laser crystals are one of the most widely studied. SFC systems are constituted by a nonlinear crystal which is optically activated by laser ions ͑usually rare earth ions such as Nd 3+ or Yb 3+ ͒. 1 Under laser operation the nonlinear properties of the host matrix activate frequencymixing processes between the different intracavity laser radiations that propagate along the gain medium ͑pump and laser͒. These intracavity nonlinear processes lead to the generation of new laser frequencies without the requirement of additional intracavity optical components, i.e., allowing for highly compact multiwavelength laser sources. 1 Among the different SFC crystals reported up to now, neodymium doped yttrium aluminum borate ͑hereafter Nd:YAB͒ is, without doubts, a paradigm. 2 It combines the good thermal, mechanical, and nonlinear properties of the YAB host with the outstanding fluorescence properties of Nd ions. 3,4 Based on this unique combination, multifrequency laser light oscillation in the three fundamental colors ͑red, green, and blue͒ has been demonstrated from a unique Nd:YAB element operating at 1.3 m. 5 In its simplest version, involving only the second harmonic ͑SH͒ of the 1064 nm laser line of Nd 3+ ions, pumpto-green optical conversion efficiencies as high as 25% have been reported. 6 Further incorporation of Nd:YAB SFC lasers in miniaturized optical devices requires the controlled fabrication of optical waveguides ͑WGs͒ in the bulk material. Up to now, WGs in Nd:YAB crystals have been only reported by light ion implantation, without demonstrating any selffrequency-doubling ͑SFD͒ laser ability. 7 In order to achieve this goal the fabricated structures should satisfy following three main requirements: ͑i͒ the fabrication procedure should preserve the original fluorescence and nonlinear properties of the Nd:YAB system, ͑ii͒ the fabricated WGs should support both TE and TM modes so that birefringence-based phase matching ͑PM, requiring orthogonal polarizations for fundamental and second harmonic waves͒ will be possible, and ͑iii͒ light confinement should be achieved in a large spectral range so that spatial confinement of both fundamental and second order radiation would be achieve...

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supporting

confidence: 87%

Self-frequency-doubling of ultrafast laser inscribed neodymium doped yttrium aluminum borate waveguides

Dong

Mendívil

Cantelar

et al. 2011

Applied Physics Letters

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“…More details on the selective metallization can be found elsewhere. [16,20] The reason to fabricate the microheater in prior to the fabrication of microresonator is for avoiding the contamination on the microresonator during the electroless plating. …”

Section: Methodsmentioning

confidence: 99%

“…[12][13][14][15][16] By tightly focusing a femtosecond laser beam in dielectric materials such as glass and crystals, the interior of the material can be modified in a space-selective manner through multiphoton absorption. This technique therefore provides an ideal solution for integrating multifunctional microcomponents in a single chip, such as a microresonator integrated with a microheater which allows rapid tuning of the resonant wavelength.…”

Section: Introductionmentioning

confidence: 99%

“…[17][18][19] Meanwhile, selective metallization has also been achieved in transparent substrates such as glass and crystal based on femtosecond laser direct writing, which has enabled fabrication of microelectrodes and on-chip microheaters. [16,20,21] Nevertheless, these techniques have not been synergistically employed for achieving on-chip tuning of the resonant wavelength of a microresonator. Here, we demonstrate fabrication of a microresonator integrated with a microheater on a single fused silica chip.…”

Section: Introductionmentioning

confidence: 99%

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On-Chip Tuning of the Resonant Wavelength in a High-Q Microresonator Integrated with a Microheater

Tang

Lin

Song

et al. 2015

International Journal of Optomechatronics

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We report on fabrication of a microtoroid resonator of a high-quality (high-Q) factor integrated with an on-chip microheater. Both the microresonator and microheater are fabricated using femtosecond laser three-dimensional (3-D) micromachining. The microheater, which is located about 200 lm away from the microresonator, has a footprint size of 200 lm Â 400 lm. Tuning of the resonant wavelength in the microresonator has been achieved by varying the voltage applied on the microheater. The response time of the integrated chip is less than 10 seconds.

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“…Ultrafast laser processing has been extensively applied to fabricate 3D photonic devices such as optical couplers and splitters [84], volume Bragg gratings [85], diffractive lenses [86], Mach-Zehnder interferometers (MZIs) [87], and waveguide lasers [88,89]. Such photonic devices rely on the writing of 3D optical waveguides that can be easily inscribed in transparent materials such as glass, crystalline materials, and polymers by inducing permanent refractive index changes in the focal volumes of tightly focused ultrafast laser pulses [90].…”

Section: D Photonic Devicesmentioning

confidence: 99%

Progress in ultrafast laser processing and future prospects

Sugioka

2017

Nanophotonics

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170

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Abstract:The unique characteristics of ultrafast lasers have rapidly revolutionized materials processing after their first demonstration in 1987. The ultrashort pulse width of the laser suppresses heat diffusion to the surroundings of the processed region, which minimizes the formation of a heat-affected zone and thereby enables ultrahigh precision micro-and nanofabrication of various materials. In addition, the extremely high peak intensity can induce nonlinear multiphoton absorption, which extends the diversity of materials that can be processed to transparent materials such as glass. Nonlinear multiphoton absorption enables three-dimensional (3D) micro-and nanofabrication by irradiation with tightly focused femtosecond laser pulses inside transparent materials. Thus, ultrafast lasers are currently widely used for both fundamental research and practical applications. This review presents progress in ultrafast laser processing, including micromachining, surface micro-and nanostructuring, nanoablation, and 3D and volume processing. Advanced technologies that promise to enhance the performance of ultrafast laser processing, such as hybrid additive and subtractive processing, and shaped beam processing are discussed. Commercial and industrial applications of ultrafast laser processing are also introduced. Finally, future prospects of the technology are given with a summary.

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Electro-optic integration of embedded electrodes and waveguides in LiNbO_3 using a femtosecond laser

Cited by 86 publications

References 15 publications

Self-frequency-doubling of ultrafast laser inscribed neodymium doped yttrium aluminum borate waveguides

Self-frequency-doubling of ultrafast laser inscribed neodymium doped yttrium aluminum borate waveguides

On-Chip Tuning of the Resonant Wavelength in a High-Q Microresonator Integrated with a Microheater

Progress in ultrafast laser processing and future prospects

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