2016
DOI: 10.1016/j.tsf.2016.02.043
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Electrical transport properties and morphology of topological insulator Bi2Se3 thin films with different thickness prepared by magnetron sputtering

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Cited by 33 publications
(15 citation statements)
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“…In 2016, Zhang et al deposited Bi Se thin films with good crystalline quality on Si within 10 min by using Bi Se alloy with purity of 99.999% as target in MSD and discussed the resistivity characteristics of the films [ 153 ]. MSD has the advantages of simple and easy control, as well as low cost and high speed; however, it also has the problems of high energy consumption and poor material quality [ 28 , 152 ].…”
Section: Synthesismentioning
confidence: 99%
“…In 2016, Zhang et al deposited Bi Se thin films with good crystalline quality on Si within 10 min by using Bi Se alloy with purity of 99.999% as target in MSD and discussed the resistivity characteristics of the films [ 153 ]. MSD has the advantages of simple and easy control, as well as low cost and high speed; however, it also has the problems of high energy consumption and poor material quality [ 28 , 152 ].…”
Section: Synthesismentioning
confidence: 99%
“…On the other hand, magnetron sputtering affords precise thickness control with uniform and high deposition rate for the preparation of large area thin films. As per existing literature, limited reports are available on Bi 2 Se 3 thin films grown by magnetron sputtering for study of WAL behavior in sputtered film 14 , 22 , 23 . The contributions of surface states and bulk carriers to total transport are highly dependent on the thickness of the film 16 .…”
Section: Introductionmentioning
confidence: 99%
“…However, there are only a limited number of studies where these models have been considered for interpreting quantitatively the WAL effect in granular systems . Evidence and description of TI properties in such polycrystalline and granular systems is of dramatic importance, since it opens the way to the use of technologically‐appealing techniques for their fabrication . Among them, Metal Organic Chemical Vapor Deposition (MOCVD) can be efficiently exploited for the growth of chalcogenide conformal thin films and nanostructures on large areas .…”
Section: Summary Of the Published α And Lϕ Values For Samples Of The mentioning
confidence: 99%