2017
DOI: 10.1016/j.mssp.2016.11.016
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Electrical properties of epitaxial Lu- or Y-doped La 2 O 3 /La 2 O 3 /Ge high- k gate-stacks

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Cited by 9 publications
(3 citation statements)
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“…For the MIS after the PMA, the current density is ~10 -6 A/cm 2 when an applied voltage is -1 V. That means a small leakage current even for the direct contact of a high-k-gate-insulator on Ge. Recent our work clearly revealed that the above electrical properties are further improved 46) . The excellent electrical properties will open a way for all epitaxial high-k gate-stacks in next-generation Ge transistors.…”
Section: An Epitaxial Gate-stack Structure For Gementioning
confidence: 56%
“…For the MIS after the PMA, the current density is ~10 -6 A/cm 2 when an applied voltage is -1 V. That means a small leakage current even for the direct contact of a high-k-gate-insulator on Ge. Recent our work clearly revealed that the above electrical properties are further improved 46) . The excellent electrical properties will open a way for all epitaxial high-k gate-stacks in next-generation Ge transistors.…”
Section: An Epitaxial Gate-stack Structure For Gementioning
confidence: 56%
“…Therefore, the La 2 O 3 (0 0 1) deposited on a Ge(1 1 1) substrate is suggested to be a feasible gate oxide without forming GeO x suboxide. In fact, a recent study reported that a Lu-doped La 2 O 3 /La 2 O 3 (0 0 1)/Ge(1 1 1) device without any extra passivation layer showed capacitancevoltage (C-V) characteristics with negligibly small hysteresis, and a low interface trap density (D it ) (less than 10 12 cm −2 eV −1 ) [22]. These findings imply the importance of controlling the orientation of both the high-κ and semiconductor materials as well as the interface atomic bonds to improve the interface properties.…”
Section: Resultsmentioning
confidence: 99%
“…Recently, several works have found that the doping of Lu can substantially improve the optoelectronic properties of the material. For example, Çolak and Karaköse prepared Lu-doped ZnO nanorods by hydrothermal and sol–gel spin-coating methods and found that while the electrical conductivity of ZnO increased, its transmissivity and photoluminescence also increased with the concentration of Lu. Therefore, Lu 3+ , which is also a 3+ cation, can be considered to replace Al 3+ as a doping element to enhance the photovoltaic properties of ZnO.…”
Section: Introductionmentioning
confidence: 99%