Elastic forward analysis using ions: A useful tool for H and light elements determination

Amorphous niobium oxide thin films

“…The chemical composition of the films was measured by both energy dispersive X-ray (EDX) and Rutherford backscattering spectroscopy (RBS). The RBS analysis was carried out using 5 MeV Li 2+ ion beam from a Tandem Van de Graff accelerator and 135°detection angle [55]. The EDX spectra were obtained in a scanning electron microscope (SEM) Cambridge-Leica Stereo Scan 440 system.…”

Mechanical and tribological characterization of CNx films deposited by d.c. magnetron sputtering

“…For FTIR analysis, the spectra were taken in transmittance mode using the films deposited onto silicon substrates. Figure 2 shows the FTIR spectrum in the 500-3000 cm ) and C=N-sp 2 bonds (1471-1689 cm -1 ), stretching vibrations of non-conjugated alkenes and azometinic groups, respectively [15,18]. The peak at 1765 cm -1 is well established with the C=O, carbonyls groups [16,17].…”

“…The chemical composition was determined from Elastic Forward Analysis (EFA) measurements using 7 Li ions of 4.0 MeV [15]. The angles between the ion beam and the sample surface and detector were 30° and 45° respectively.…”

a-CN thin film properties as a function of laser ablation plasma parameters

“…Compositional analysis was performed by Energy Dispersive Spectrometry (EDS) using a scanning electron microscope (Phillips XL-30) equipped with an EDS probe, in this case prior to the measurements the signal was calibrated using a standard for low Z elements with an excitation energy of 5 keV. Some samples were studied by elastic forward analysis (EFA) [9], in this case a 4.0 MeV 7 Li ion beam from a Tandem Van de Graff accelerator was used. The angle between the ion beam and the sample surface was fixed at 30°while the angle between the detected particles and the incident ion beam was fixed at 45°.…”