To provide a fundamental knowledge for the high efficiency grinding and ultra-precision grinding of fused silica, ductile mode and brittle mode material removal mechanisms were investigated by conducting micro/nanoindentation experiments in the range of 4.9 mN - 1960 mN. Before observing cracks and determining the ductile to brittle transition penetration depth, the samples were etched with hydrofluoric acid to expose cracks. The typical damage morphology of fused silica was discussed by observing the surface and cross-section of indentations, and the depth of SSD was found to be determined by the cone cracks or borderline cracks in the different load range. The ductile to brittle transition penetration depth of fused silica under Vickers indentation was 180 nm.