Effects of RF magnetron sputtering deposition process parameters on the properties of molybdenum thin films

Chelvanathan, Puvaneswaran; Shahahmadi, Seyed Ahmad; Arith, Faiz; Sobayel, K.; Aktharuzzaman, M.; Sopian, Kamaruzzaman; Alharbi, Fahhad H.; Tabet, Nouar; Amin, Nowshad

doi:10.1016/j.tsf.2017.07.057

Cited by 53 publications

(22 citation statements)

References 31 publications

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“…The lowest resistivity is shown by films prepared at 3 mTorr and 200 W (0.66 Ω/sq = 39.6 μΩ·cm), falling in the required range for back contacts. This range of conductivity has been reported for bilayer Mo films with thickness values in the range of 0.9 to 1.2 μm [14–16], which is 1.5-times the value of our samples.…”

Section: Resultssupporting

confidence: 77%

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Optimization of Mo/Cr bilayer back contacts for thin-film solar cells

Khoshsirat¹,

Ali²,

Tiong³

et al. 2018

Beilstein J. Nanotechnol.

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Molybdenum (Mo) is the most commonly used material as back contact in thin-film solar cells. Adhesion of Mo film to soda–lime glass (SLG) substrate is crucial to the performance of solar cells. In this study, an optimized bilayer structure made of a thin layer of Mo on an ultra-thin chromium (Cr) adhesion layer is used as the back contact for a copper zinc tin sulfide (CZTS) thin-film solar cell on a SLG substrate. DC magnetron sputtering is used for deposition of Mo and Cr films. The conductivity of Mo/Cr bilayer films, their microstructure and surface morphology are studied at different deposition powers and working pressures. Good adhesion to the SLG substrate has been achieved by means of an ultra-thin Cr layer under the Mo layer. By optimizing the deposition conditions we achieved low surface roughness, high optical reflectance and low sheet resistivity while we could decrease the back contact thickness to 600 nm. That is two thirds to half of the thickness that is currently being used for bilayer and single layer back contact for thin-film solar cells. We demonstrate the excellent properties of Mo/Cr bilayer as back contact of a CZTS solar cell.

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Section: Resultssupporting

confidence: 77%

“…Moreover, the thickness of the bilayer Mo film needs to be in the range of 900 nm to 1.2 μm to achieve a good conductivity. One of our goals in this work was to reduce the back contact thickness, which would lead to cost reduction [14–16]. …”

Section: Introductionmentioning

confidence: 99%

Optimization of Mo/Cr bilayer back contacts for thin-film solar cells

Khoshsirat¹,

Ali²,

Tiong³

et al. 2018

Beilstein J. Nanotechnol.

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show abstract

“…Similarly to the presented results of molybdenum (Mo) back contact film, a BCC structure with strong (110) peak at 2θ = 40.5 • (Figure 2) was found by many researchers (e.g., [18,26,27]). Second, weak (211) peak at 2θ = 73.5 • was also observed by Su et al [28] for higher power applied to the cathode (between 3.5 W/cm 2 and 4.5 W/cm 2 ).…”

Section: Discussionsupporting

confidence: 81%

RF/DC Magnetron Sputtering Deposition of Thin Layers for Solar Cell Fabrication

Gulkowski

Krawczak

2020

Coatings

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Thin film Cu(In,Ga)Se2 (CIGS)-based solar cells with relatively high efficiency and low material usage might become a promising alternative for crystalline silicon technology. The most challenging task nowadays is to decrease the PV module fabrication costs by application of easily scalable industrial process. One of the possible solutions is the usage of magnetron sputtering system for deposition of all structures applied in CIGS-based photovoltaic device. The main object of these studies was fabrication and characterization of thin films deposited by sputtering technique. Structural and electrical properties of the sputtered films were analyzed using scanning electron microscopy (SEM), energy-dispersive X-ray spectroscopy (EDS), X-ray Powder Diffraction (XRD), and four-point probe resistivity measurements. The presented findings revealed technological parameters for which sheet resistance of molybdenum (Mo) back contact decreased up to 0.3 Ω/□ and to even 0.08 Ω/□ in case of aluminum layer. EDS analysis provided evidence for the appropriate stoichiometry of CIGS absorber (with CGI and GGI equal to 0.96 and 0.2, respectively). XRD characterization confirmed high-quality chalcopyrite polycrystalline structure of Cu(In,Ga)Se2 film fabricated at relatively low substrate temperature of 400 °C. Characteristic XRD peaks of hexagonal-oriented structures of sputtered CdS and i-ZnO layers were noticed.

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“…Analysis of thin films was preferred against analyzing of bulk materials because of the highly homogenous surface of sputtered and thermally evaporated samples. Thin films of sputtered Mn, Mo, W, and thermally evaporated Zn thin films are known to have smooth surfaces. It is proven, that scratches, cracks or even residuals from polishing agents have an effect on the Volta potential of a surface .…”

Section: Resultsmentioning

confidence: 99%

Suitability of Various Materials for Probes in Scanning Kelvin Probe Measurements

Huber

Wicinski

Hassel

2017

Physica Status Solidi (a)

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Volta potential of a material can be easily determined by using scanning Kelvin probe (SKP), but up to now there is no standard method established. This study focuses on finding an alternative or even a standard material for SKP probes. Re, Ni, and Mo are analyzed regarding their suitability for serving as tips in SKP measurements. For comparison purposes, a commonly used NiCr probe is analyzed too. Linearity, the sensitivity to humidity changes as well as the lateral and Volta potential resolution are determined for various probe materials. Linearity is excellent for all tested probes. SKP measurements carried out under humidity variations shows dissimilar results for all different metal probes. Lateral and Volta potential resolution are the best for Re and Ni tips. There may be a correlation between the work function of a material and its suitability for serving as a probe in Kelvin measurements − the higher the work function, the better the resolution of Volta potentials. Based on the results, it can be concluded that pure Re and Ni are more suitable for serving as SKP probes than NiCr alloy.

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Effects of RF magnetron sputtering deposition process parameters on the properties of molybdenum thin films

Cited by 53 publications

References 31 publications

Optimization of Mo/Cr bilayer back contacts for thin-film solar cells

Optimization of Mo/Cr bilayer back contacts for thin-film solar cells

RF/DC Magnetron Sputtering Deposition of Thin Layers for Solar Cell Fabrication

Suitability of Various Materials for Probes in Scanning Kelvin Probe Measurements

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