The effect of lattice-misfit strain on the process-induced imprint behavior in Pb͑Zr 0.52 Ti 0.48 ͒O 3 (PZT) capacitors with Pt (top), and SrRuO 3 , La 0.7 Sr 0.3 MnO 3 or LaNiO 3 (bottom) electrodes has been studied. With the different oxide electrodes and by changing the deposition oxygen pressure, various lattice-misfit strains in the epitaxial PZT films have been produced. It was found that after in situ annealing at reduced oxygen pressures, the capacitors showed an increased voltage offset in the polarization-electric field hysteresis loops with increasing the misfit strain, irrelevant to the oxide electrodes employed, while lattice disorder at the bottom interface can effectively eliminate the voltage shift. Our results suggest that the imprint behavior is caused by oxygen loss via dislocations generated by the misfit strain relaxation at the growth temperature. Ferroelectric thin films possess a unique set of physical properties and have great potential for use in various electronic devices. 1 For successful implementation of ferroelectric devices based on polarization reversal, symmetric switching between two opposite polarization states must be ensured. However, it is often observed that ferroelectric films exhibit significant imprint, or asymmetry of switching parameters, such as the coercive field ͑E c ͒ and the remnant polarization ͑P r ͒. 2-10 The cause of the imprint is generally attributed to the presence of an internal electric field in the capacitor which supports the given polarization state while opposing the antiparallel one. However, there is a lack of understanding on the formation of the internal field. Different models, such as the aligned dipolar defect complexes and asymmetric distribution of charged defects through a bulk thin film, 2-5 and a built-in electric field or a nonswitching layer at the ferroelectric-electrode interface, 6-9 have been proposed to explain the asymmetric behavior of ferroelectric capacitors.Pb͑Zr, Ti͒O 3 (PZT) and their derivatives are the most extensively studied ferroelectric materials due to their large P r , low E c and processing temperature. Since the PZT capacitors with noble metal electrodes like Pt exhibit a significant polarization loss when subject to bipolar switching pulses, in the past decade, for the growth of fatigue-free PZT capacitors and especially in the epitaxial form, various oxide electrodes such as La 0.5 Sr 0.5 CoO 3 (LSCO), SrRuO 3 (SRO), La 0.7 Sr 0.3 MnO 3 (LSMO), and LaNiO 3 (LNO) have been employed. [3][4][5][6][7][8]11,12 For epitaxial LSCO/PZT/LSCO capacitors, however, when exposed to reducing atmosphere for device fabrication, a large voltage offset was observed. [3][4][5] This process-induced imprint behavior was greatly complicated by the instability of the LSCO layer at reduced oxygen pressures, 5,13 and rarely examined for the other oxide electrodes. Comparatively, SRO, LSMO, and LNO are very stable and have different lattice constants. 14,15 Abe et al. demonstrated that the lattice-misfit strain is important for the voltag...