“…3) Thus, these luminescence properties are promising for fabricating light-emitting devices for optical fiber communication. 4) Er-doped GaAs is often obtained by epitaxial growth, such as molecular beam epitaxy (MBE), 1,5,6) metalorganic vapor phase epitaxy, 3,7,8) and liquid phase epitaxy, 9) along with ion implantation. 10,11) The surface segregation of Er atoms during epitaxial growth is a significant obstacle to obtaining elaborate semiconductor structures.…”