2013
DOI: 10.1016/j.jcrysgro.2012.12.049
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Effects of growth temperature and buffer scheme on characteristics of InP-based metamorphic InGaAs photodetectors

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Cited by 28 publications
(19 citation statements)
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“…[49][50][51] In addition, recently, the effect of low dark current, high responsivity, growth temperature, and anodic oxide passivation layer on the InGaAs/InP photodetectors have been investigated for increasing the infrared photodetector performance. [55][56][57] In this present work, the In x Ga 1-x As/InP structures for photodetector applications were reported. The three In x Ga 1-x As thin film layers were grown on n-type InP substrates by using a solid source MBE system.…”
Section: Introductionmentioning
confidence: 87%
“…[49][50][51] In addition, recently, the effect of low dark current, high responsivity, growth temperature, and anodic oxide passivation layer on the InGaAs/InP photodetectors have been investigated for increasing the infrared photodetector performance. [55][56][57] In this present work, the In x Ga 1-x As/InP structures for photodetector applications were reported. The three In x Ga 1-x As thin film layers were grown on n-type InP substrates by using a solid source MBE system.…”
Section: Introductionmentioning
confidence: 87%
“…The material samples M1 and M2 with InAlAs /In 0.83 Ga 0.17 As/InAlAs p-i-n epitaxial structure were grown on semi-insulating InP substrate by Gas Source Molecular Beam Epitaxy (GSMBE) [14,17]. The epitaxial structure consisted of a 1.9 lm N-InAlAs buffer layer with a doping concentration of about 3 Â 10 18 cm À3 , a 1.5 lm n-In 0.83 Ga 0.17 As absorption layer (3 Â 10 16 cm À3 ) and a 0.6 lm P-InAlAs cap layer (2 Â 10 18 cm À3 ).…”
Section: Experiments Detailsmentioning
confidence: 99%
“…The extended wavelength InGaAs detector can cover 1.0-2.5 lm detection waveband with 0.83 indium content, and it has several advantages such as high responsivity, wonderful uniformity and low energy consumption, so it can be widely used in space remote sensing, passive night vision and so on [1][2][3][4][5][6][7][8]. It is a well-known fact that the research of Ohmic contacts is a fundamental topic for semiconductors, and Ohmic contact is very important for semiconductor detector [9][10][11][12][13], because it affects the quantum efficiency and response time, and generally, the Ohmic contact resistance is the-smaller-the-better.…”
Section: Introductionmentioning
confidence: 99%