2016
DOI: 10.1016/j.jallcom.2016.02.215
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Effects of annealing conditions on resistive switching characteristics of SnOx thin films

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Cited by 25 publications
(17 citation statements)
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“…As-deposited SnO X by direct current (DC) reactive magnetron sputtering has already been verified the RS in a Ag/SnO X /ITO device by Da chen and Shi-Hua Huang, and it showed a low resistance of less than 3 kΩ and a resistance window of less than ~10 [ 13 , 14 ]. In addition, Jidong Jin et al reported that the DC-sputtered SnO X showed poor RS on the stack of an Al/SnO X /Pt device [ 15 ]. Our DC-sputtered SnO X was fabricated at room temperature and showed normal RS behavior.…”
Section: Introductionmentioning
confidence: 99%
“…As-deposited SnO X by direct current (DC) reactive magnetron sputtering has already been verified the RS in a Ag/SnO X /ITO device by Da chen and Shi-Hua Huang, and it showed a low resistance of less than 3 kΩ and a resistance window of less than ~10 [ 13 , 14 ]. In addition, Jidong Jin et al reported that the DC-sputtered SnO X showed poor RS on the stack of an Al/SnO X /Pt device [ 15 ]. Our DC-sputtered SnO X was fabricated at room temperature and showed normal RS behavior.…”
Section: Introductionmentioning
confidence: 99%
“…23 Jin et al also fabricated forming-free Al/ SnO x /Pt devices annealed in nitrogen, and explained formingfree switching due to sufficient oxygen vacancies generated in the nitrogen-annealed SnO x layer. 29 Rehman et al introduced oxygen annealing in Cu x O thin lm based devices, and found that the R on /R off ratio increased about 3 orders of magnitude. 24 Above studies demonstrated that annealing atmosphere can signicantly degrade or enhance the RS performance.…”
Section: Introductionmentioning
confidence: 99%
“…24 Above studies demonstrated that annealing atmosphere can signicantly degrade or enhance the RS performance. 24,29 However, to date, the RS studies in annealing atmosphere are focused on only one gas atmosphere or single switching parameter. 29 Few reports are found in literature on systematical investigation into the effect of annealing atmosphere (oxygen, air, nitrogen) on the RS effect.…”
Section: Introductionmentioning
confidence: 99%
“…In our previous study, we reported that crystal structure of CeO 2 film is influenced by oxygen annealing treatment, and an amount of oxygen vacancies in the bilayer structures CeO 2 /TiO 2 and ZnO/CeO 2 films can improve the switching parameters [22,23]. Jin et al [24] found significant improvement in bipolar resistive switching characteristics after annealing at 300°C in nitrogen atmosphere. According to our previous study and literature, effect of oxygen annealing environment on resistive switching characteristics of CeO 2 -based RRAM device appears to be suitable for improving the switching parameters.…”
Section: Introductionmentioning
confidence: 97%