Effective mechanical trimming of micro shell resonator with T-shape masses

Lü, Kun; Li, Wei; Hou, Zhanqiang; Xiao, Dingbang; Wu, Yulie; Wu, Xuezhong; Zhuo, Ming

doi:10.1109/transducers.2017.7994252

Cited by 10 publications

(4 citation statements)

References 14 publications

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“…Xiao et al [ 94 ], Lu et al [ 111 , 112 , 113 ], Li et al [ 114 , 115 , 116 ], and Shi et al [ 117 , 118 , 119 ] improved the fabrication method of Li et al [ 110 ] by putting molds on an adjustable whirling platform and using a femtosecond ablation method to release the shell with T-shape masses to enhance the symmetry of the shell resonators and decrease roughness. Figure 14 shows the fabrication process, final product and performance of the HRG (Sun et al [ 120 ]).…”

Section: Microscale Hrg Fabrication Methods and Materialsmentioning

confidence: 99%

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Ranji

Damodaran

et al. 2022

Micromachines

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Macro-scale, hemispherical-shaped resonating gyroscopes are used in high-precision motion and navigation applications. In these gyroscopes, a 3D wine-glass, hemispherical-shaped resonating structure is used as the main sensing element. Motivated by the success of macroscale hemispherical shape gyroscopes, many microscale hemispherical-shaped resonators have been produced due to the rapid advancement in semiconductor-based microfabrication technologies. The dynamic performance of hemispherical resonators depends on the degree of symmetry, uniformity of thickness, and surface smoothness, which, in turn, depend on the type of materials and fabrication methods. The main aim of this review paper is to summarize the materials, characterization and fabrication methods reported in the literature for the fabrication of microscale hemispherical resonator gyroscopes (µHRGs). The theory behind the development of HRGs is described and advancements in the fabrication of microscale HRGs through various semiconductor-based fabrication techniques are outlined. The integration of electrodes with the hemispherical structure for electrical transduction using other materials and fabrication methods is also presented. A comparison of different materials and methods of fabrication from the point of view of device characteristics and dynamic performance is discussed. This review can help researchers in their future research and engineers to select the materials and methods for µHRG development.

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Section: Microscale Hrg Fabrication Methods and Materialsmentioning

confidence: 99%

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Ranji

Damodaran

et al. 2022

Micromachines

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“…The vibration-type silicon micro-gyroscope can also be further divided into linear vibration [26] and angular vibration [27]. More specifically, according to the principles and sensitive structure, the vibration-type silicon micro-gyroscope can be divided into the double frame type [28][29][30][31][32][33][34][35][36][37][38][39][40][41], tuning fork type , micro-hemisphere resonance type [71][72][73][74][75][76][77][78][79][80][81][82][83][84][85][86], vibration ring type [87][88][89][90][91][92][93][94], nested ring , piezoelectric vibration type [117][118][119][120][121][122][123]…”

Section: Main Performance Indexes Of Microgyroscopementioning

confidence: 99%

“…In 2021, the rate-integrating micro-hemispherical resonator micro-gyroscope with the structure as shown in Fig. 6(e) was produced by B. Li, et al [79][80][81][82][83][84][85][86] in China. The contact edge has 16 T-shaped test masses to increase the contact area with the surface electrode to improve the sensitivity.…”

Section: Micro-hemispherical Resonant Microgyroscopementioning

confidence: 99%

MEMS and MOEMS Gyroscopes: A Review

Huang,

Yan,

Zhang

et al. 2023

Photonic Sens

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Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-mechanical system (MOEMS) are the new-generation and recently well-developed gyroscopes produced by the combinations of the traditional gyroscope technology and MEMS/MOEMS technologies. According to the working principle and used materials, the newly-reported micro-gyroscopes in recent years include the silicon-based micromechanical vibratory gyroscope, hemispherical resonant gyroscope, piezoelectric vibratory gyroscope, suspended rotor gyroscope, microfluidic gyroscope, optical gyroscope, and atomic gyroscope. According to different sensitive structures, the silicon-based micromechanical vibratory gyroscope can also be divided into double frame type, tuning fork type, vibrating ring type, and nested ring type. For those micro-gyroscopes, in recent years, many emerging techniques are proposed and developed to enhance different aspects of performances, such as the sensitivity, angle random walk (ARW), bias instability (BI), and bandwidth. Therefore, this paper will firstly review the main performances and applications of those newly-developed MEMS/MOEMS gyroscopes, then comprehensively summarize and analyze the latest research progress of the micro-gyroscopes mentioned above, and finally discuss the future development trends of MEMS/MOEMS gyroscopes.

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“…Specifically, a microshell resonator fabricated from fused silica with low thermoelastic damping has the potential to achieve an ultrahigh Q factor of over 5 million and a ringdown time of 295 s, as reported in the reference 4 . Furthermore, the inherent symmetrical structure of the microshell resonator has excellent symmetrical characteristics, and the stiffness asymmetry can be further reduced by mechanical trimming to obtain a perfect resonator 17,18 . Above all, combining a microshell resonator and whole-angle mode is a perfect collaboration to realize high-performance micromachined gyroscopes.…”

Section: Introductionmentioning

confidence: 99%

0.79 ppm scale-factor nonlinearity whole-angle microshell gyroscope realized by real-time calibration of capacitive displacement detection

et al. 2021

Self Cite

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Whole-angle gyroscopes have broad prospects for development with inherent advantages of excellent scale factor, wide bandwidth and measurement range, which are restrictions on rate gyroscopes. Previous studies on the whole-angle mode are based mostly on the linear model of Lynch, and the essential nonlinearity of capacitive displacement detection is always neglected, which has significant negative effects on the performance. In this paper, a novel real-time calibration method of capacitive displacement detection is proposed to eliminate these nonlinear effects. This novel method innovatively takes advantage of the relationship between the first and third harmonic components of detective signals for calibration. Based on this method, the real-time calibration of capacitive displacement detection is achieved and solves the problems of traditional methods, which are usually related to the vibration amplitude, environmental variations and other factors. Furthermore, this novel calibration method is embedded into a whole-angle control system to restore the linear capacitive response in real time and then combined with a microshell resonator for the first time to exploit the enormous potential of an ultrahigh Q factor and symmetric structure. The effectiveness is proven because the angle drift is reduced significantly to improve the scale-factor nonlinearity by 14 times to 0.79 ppm with 0.0673°/h bias instability and a 0.001°/s rate threshold, which is the best reported performance of the MEMS whole-angle gyroscope thus far. More importantly, this novel calibration method can be applied for all kinds of resonators with the requirement of a linear capacitive response even under a large resonant amplitude.

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Effective mechanical trimming of micro shell resonator with T-shape masses

Cited by 10 publications

References 14 publications

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

MEMS and MOEMS Gyroscopes: A Review

0.79 ppm scale-factor nonlinearity whole-angle microshell gyroscope realized by real-time calibration of capacitive displacement detection

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