0.79 ppm scale-factor nonlinearity whole-angle microshell gyroscope realized by real-time calibration of capacitive displacement detection

Sun, Jiangkun; Shen, Yu; Zhang, Yongmeng; Li, Qingsong; Xi, Xiang; Lü, Kun; Wu, Xuezhong; Xiao, Dingbang

doi:10.1038/s41378-021-00306-6

Cited by 22 publications

(9 citation statements)

References 30 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In the current μHRG design, the mode, which is also known as the wineglass mode, is selected as the working resonance mode 35 , 58 , 59 . To further analyze the frequency behavior of the μHSR with the sputtered metal coating near its mode, a detailed frequency scan is conducted, and the results are illustrated in Fig.…”

Section: Resultsmentioning

confidence: 99%

A 3D-printed microhemispherical shell resonator with electrostatic tuning for a Coriolis vibratory gyroscope

Hou,

Zhu,

et al. 2024

Microsyst Nanoeng

View full text Add to dashboard Cite

The emergence of microhemispherical resonant gyroscopes, which integrate the advantages of exceptional stability and long lifetime with miniaturization, has afforded new possibilities for the development of whole-angle gyroscopes. However, existing methods used for manufacturing microhemispherical resonant gyroscopes based on MEMS technology face the primary drawback of intricate and costly processing. Here, we report the design, fabrication, and characterization of the first 3D-printable microhemispherical shell resonator for a Coriolis vibrating gyroscope. We remarkably achieve fabrication in just two steps bypassing the dozen or so steps required in traditional micromachining. By utilizing the intricate shaping capability and ultrahigh precision offered by projection microstereolithography, we fabricate 3D high-aspect-ratio resonant structures and controllable capacitive air gaps, both of which are extremely difficult to obtain via MEMS technology. In addition, the resonance frequency of the fabricated resonators can be tuned by electrostatic forces, and the fabricated resonators exhibit a higher quality factor in air than do typical MEMS microhemispherical resonators. This work demonstrates the feasibility of rapidly batch-manufacturing microhemispherical shell resonators, paving the way for the development of microhemispherical resonator gyroscopes for portable inertial navigation. Moreover, this particular design concept could be further applied to increase uptake of resonator tools in the MEMS community.

show abstract

Section: Resultsmentioning

confidence: 99%

A 3D-printed microhemispherical shell resonator with electrostatic tuning for a Coriolis vibratory gyroscope

Hou,

Zhu,

et al. 2024

Microsyst Nanoeng

View full text Add to dashboard Cite

show abstract

“…In the current μHRG design, the = 2 mode which is also known as wineglass mode is selected as the working resonance modes 35,59,60 . To further analyze the frequency behavior of the μHSR with the sputtered metal coating near its = 2 mode, a detailed frequency scan is conducted, and the results are illustrated in Fig.…”

Section: Resultsmentioning

confidence: 99%

A 3D-printed micro-hemispherical shell resonator with electrostatic tuning for Coriolis vibratory gyroscope

Che,

Hou,

Zhu

et al. 2023

Preprint

View full text Add to dashboard Cite

The emergence of micro-hemispherical resonant gyroscopes, combining the advantages of exceptional stability and long lifetime with miniaturization, has opened up new possibilities for the development of whole-angle gyroscopes. The primary drawback of the existing methods used for manufacturing micro-hemispherical resonant gyroscopes based on MEMS technology is the intricate and costly process involved. Here we report the design, fabrication, and characterization of the first 3D-printable micro-hemispherical shell resonator for Coriolis vibrating gyroscope. One remarkable advancement is fabrication in just two steps, rather than the dozen or so steps of traditional micromachining. Utilizing the intricate shaping capability and ultra-high precision offered by projection micro stereolithography, we are able to fabricate 3D high-aspect-ratio resonant structures and controllable capacitive air gaps, both of which are extremely difficult for MEMS technology. In addition, the fabricated resonators can be tuned for resonance frequency by electrostatic forces and exhibit higher quality factor in air compared to MEMS micro-hemispherical resonators. This work demonstrates the feasibility of rapidly batch-manufacturing micro-hemispherical shell resonators, paving the way for the development of micro-hemispherical resonator gyroscopes for portable inertial navigation. Concurrently, this particular design concept could be further applied to increase the uptake in the MEMS community.

show abstract

“…The inner surface of the resonant spherical shell is metallized by magnetron sputtering. After coating, the micro hemisphere resonator will have good conductivity and can be used for electrical-related testing [30,31].…”

Section: Theoretical Model Establishment and Analysismentioning

confidence: 99%

The influence of photothermal effect on the resonance frequency of fused silica micro hemispherical resonator

Wang,

Hu,

Zheng

et al. 2023

Meas. Sci. Technol.

View full text Add to dashboard Cite

Micro-electro mechanical system resonant gyroscope plays a more and more important role in inertial navigation. As a core sensing component of micro resonant gyroscope, fused silica micro hemispherical resonator (FS-MHR) is widely concerned because of its great performance potential. The resonance frequency is one of the important characteristic parameters of micro resonators, and laser vibration measurement technology is often used for high-precision measurement of this parameter. During the measurement process, it is inevitably affected by the interference of some light sources. To explore how light affects the resonance characteristics of FS-MHR, this paper establishes a relevant theoretical model; and verifies and analyzes the influence of the photothermal effect on the resonance characteristics of FS-MHR through simulation and experiment. Revealed the trend of temperature and resonance frequency changes over time under the same lighting conditions for uncoated and metal-coated films. The measured data shows that the resonance frequency of FS-MHR coated with the metal film is more susceptible to the influence of the photothermal effect. After 60 s of illumination, the resonance frequency will increase by 6.13 Hz, and frequency splitting will also cause a deviation fluctuation of 2.35 Hz under continuous illumination. This will introduce certain errors in the measurement results, and corresponding measures need to be taken to avoid interference from the light source.

show abstract

0.79 ppm scale-factor nonlinearity whole-angle microshell gyroscope realized by real-time calibration of capacitive displacement detection

Cited by 22 publications

References 30 publications

A 3D-printed microhemispherical shell resonator with electrostatic tuning for a Coriolis vibratory gyroscope

A 3D-printed microhemispherical shell resonator with electrostatic tuning for a Coriolis vibratory gyroscope

A 3D-printed micro-hemispherical shell resonator with electrostatic tuning for Coriolis vibratory gyroscope

The influence of photothermal effect on the resonance frequency of fused silica micro hemispherical resonator

Contact Info

Product

Resources

About