Effect of workpiece properties on machinability in abrasive jet machining of ceramic materials

Wakuda, Manabu; Yamauchi, Yukihiko; Kanzaki, Shuzo

doi:10.1016/s0141-6359(01)00114-3

Cited by 66 publications

(18 citation statements)

References 14 publications

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“…Both laboratory and field tests show substantial friction reduction and up to threefold increase in seal life [1]. At the same time, reactive ion etching (RIE) [2] and micro-blaster [3] are the effective texturing techniques for ceramics; micro-electrolytic etching shows great potential on the efficient texturing of metal surfaces [4] without undesirable effects on the surfaces. Surface texturing design is an important part of surface engineering.…”

Section: Introductionmentioning

confidence: 99%

Geometric Shape Effects of Surface Texture on the Generation of Hydrodynamic Pressure Between Conformal Contacting Surfaces

2009

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Micro-surface texturing design is becoming an important part of surface engineering since engineering practices and analyses have indicated that surface textures may significantly affect the tribological performance of contact interfaces. Advances in the manufacturing technologies of surface finishing and micro-machining, such as laser surface texturing, photolithography, and etching, LIGA process, have made it possible to fabricate different fine structures on various engineering surfaces. Though the influence of micro-surface texturing on hydrodynamic lubrication has been widely investigated over the last decade, such an influence may be complicated and difficult to characterize with only a few statistic surface parameters. Thus, very little attention has been paid to the effects of different textural shapes and orientations on hydrodynamic lubrication, which is the main topic of this article. A theoretical model based on a single dimple was established to investigate the geometric shape and orientation effects on the hydrodynamic pressure generated between conformal contacting surfaces. Using the Successive Over Relaxation method, the average hydrodynamic pressure generated by the texture pattern with the dimples in shapes of circle, ellipse, and triangle at different orientations to the direction of sliding are obtained. The results indicate that geometric shape and orientation have obvious influences on load-carrying capacity of contacting surfaces. With the same dimple area, area ratio and dimple depth given in this research, ellipse dimples perpendicular to the sliding direction showed the best load-carrying capacity. This result agrees with previous experimental results very well.

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Section: Introductionmentioning

confidence: 99%

Geometric Shape Effects of Surface Texture on the Generation of Hydrodynamic Pressure Between Conformal Contacting Surfaces

2009

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“…As a result of this action on a workpiece there is formation of a surface layer giving various ceramic materials improved properties [2]. A favorable effect includes a reduction in the number of defects, forming after diamond grinding and intensifying object wear during operation [3,4].…”

Section: Introductionmentioning

confidence: 99%

Effect of Air-Abrasive Treatment on Oxide-Carbide Ceramic Object Operating Properties

et al. 2016

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“…Micromachining of brittle materials, such as glass or silicon, is important in MEMS and semiconductor fabrication processes, and micro-abrasive jet machining (µ-AJM) has become an effective micromachining technique [1][2][3]. Since the µ-AJM process is mainly based on the erosion of a mask that protects the brittle substrate from high-velocity microparticles, an adequate mask is very important.…”

Section: Introductionmentioning

confidence: 99%

Development of rapid mask fabrication technology for micro-abrasive jet machining

et al. 2008

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Micro-machining of a brittle material such as glass or silicon is important in micro fabrication. Particularly, microabrasive jet machining (µ-AJM) has become a useful technique for micro-machining of such materials. The µ-AJM process is mainly based on the erosion of a mask which protects brittle substrate against high velocity of microparticles. Therefore, fabrication of an adequate mask is very important. Generally, for the fabrication of a mask in the µ-AJM process, a photomask based on the semi-conductor fabrication process was used. In this research a rapid mask fabrication technology has been developed for the µ-AJM. By scanning the focused UV laser beam, a micro-mask pattern was fabricated directly without photolithography process and photomask. Therefore, rapid and economic mask fabrication can be possible for the micro-abrasive jet machining. Two kinds of mask patterns were fabricated by using SU-8 and photopolymer (Watershed 11110). Using fabricated mask patterns, abrasive-jet machining of Si wafer was conducted successfully.

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Effect of workpiece properties on machinability in abrasive jet machining of ceramic materials

Cited by 66 publications

References 14 publications

Geometric Shape Effects of Surface Texture on the Generation of Hydrodynamic Pressure Between Conformal Contacting Surfaces

Geometric Shape Effects of Surface Texture on the Generation of Hydrodynamic Pressure Between Conformal Contacting Surfaces

Effect of Air-Abrasive Treatment on Oxide-Carbide Ceramic Object Operating Properties

Development of rapid mask fabrication technology for micro-abrasive jet machining

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