2008
DOI: 10.1016/j.jcrysgro.2008.05.013
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Effect of substrate temperature on the microstructure and transport properties of highly (100)-oriented LaNiO3−δ films by pure argon sputtering

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Cited by 18 publications
(12 citation statements)
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“…Atomic force microscopic analysis was employed to characterize surface morphology; the average grain size of the LNO thin films was 200 nm. Liang and Xiaofang [43] investigated the growth mechanism of LNO films on single crystal (1 0 0) silicon substrates fabricated by RF magnetron sputtering method. The authors reported that the LNO film deposited at 400 1C shows an amorphous structure without grains on the surface, while grains with an average size of 8 nm, 25 nm, 36 nm and 43 nm were observed to LNO films deposited at 500 1C, 600 1C, 700 1C and 800 1C, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…Atomic force microscopic analysis was employed to characterize surface morphology; the average grain size of the LNO thin films was 200 nm. Liang and Xiaofang [43] investigated the growth mechanism of LNO films on single crystal (1 0 0) silicon substrates fabricated by RF magnetron sputtering method. The authors reported that the LNO film deposited at 400 1C shows an amorphous structure without grains on the surface, while grains with an average size of 8 nm, 25 nm, 36 nm and 43 nm were observed to LNO films deposited at 500 1C, 600 1C, 700 1C and 800 1C, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…The increase in these defects would expand the lattice constant, and hence result in the low angle-shift of XRD peaks. Otherwise, lower T s would benefit the generation of strains in films and formation of dislocations between a film and a substrate, which might contribute to the shift as well [24,25]. Utilizing the (0 0 0 2) peaks of XRD patterns shown in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…1(a) shows the XRD patterns of LNO films with different thickness on Si substrates. It is seen that the LNO films of all thicknesses exhibit preferred (100)-orientation [10,11]. With increasing the film thickness from 100 nm to 400 nm, the intensity of the LNO (200) peak gradually increases and the full width at half maximum (FWHM) decreases, indicating that the crystallinity of the film has been improved and the grain size is enlarged.…”
Section: Contents Lists Available At Sciencedirectmentioning
confidence: 96%