2009
DOI: 10.1016/j.tsf.2008.12.056
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Effect of LaNiO3 buffer layer thickness on the microstructure and electrical properties of (100)-oriented BaTiO3 thin films on Si substrate

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Cited by 13 publications
(7 citation statements)
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References 27 publications
(28 reference statements)
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“…The average grain size of (110)-SRO films was about 80 nm which is lower than 150 nm of (001)-SRO films. The difference in grain size of SRO films was attributed to the different interface between the deposited films and the substrates, which is similar to the previous results which reported that an increase of the LNO thickness promotes an increase of the grain size of the upper BaTiO 3 films [18]. Both the cross-sectional images of SRO films reveal dense microstructures, a uniform thickness of 240 nm, and a sharp interface with the LNO or the substrate.…”
Section: Resultssupporting
confidence: 88%
See 1 more Smart Citation
“…The average grain size of (110)-SRO films was about 80 nm which is lower than 150 nm of (001)-SRO films. The difference in grain size of SRO films was attributed to the different interface between the deposited films and the substrates, which is similar to the previous results which reported that an increase of the LNO thickness promotes an increase of the grain size of the upper BaTiO 3 films [18]. Both the cross-sectional images of SRO films reveal dense microstructures, a uniform thickness of 240 nm, and a sharp interface with the LNO or the substrate.…”
Section: Resultssupporting
confidence: 88%
“…As LNO thickness increases, the (110) pc orientation was suppressed, but the (001) pc orientation was enhanced and completely (001) pc oriented SRO films were obtained when the thickness reached 300 nm. LNO films with different thickness have different crystallization quality and orientations, and they can directly affect the nucleation and growth dynamics of the sputtered atoms [18]. The position of the peaks for both SRO films on SiO 2 /Si (aliased as (110)-SRO) and on LNO300/SiO 2 /Si (aliased as (001)-SRO) indicate [19][20][21].…”
Section: Resultsmentioning
confidence: 99%
“…For ZnO , the optical properties were found to depend on the thickness of a buffer layer 55 . Also, when depositing BaTiO the electronic and structural properties were strongly influenced by the thickness of a LaNiO buffer layer on a Si substrate 59 . The broad range of preferential growth directions in our perovskite film without MAI evaporation onset delay point to different influences from subjacent ITO , np-SnO and C layers, where no dominating effect can be isolated.…”
Section: Discussionmentioning
confidence: 99%
“…Besides, it has been found that the crystallization temperature of ferroelectric films can be reduced by using buffer layer, because the crystallization nucleation of ferroelectric films is much easier on buffer layer than that on the Si or Pt substrate [14][15][16][17] . For example, Qiao et al 21 have reported (001)-oriented BT films can be induced by LaNiO 3 (LNO) buffer layer. For example, Qiao et al 21 have reported (001)-oriented BT films can be induced by LaNiO 3 (LNO) buffer layer.…”
Section: Introductionmentioning
confidence: 99%