2011
DOI: 10.1149/1.3528169
|View full text |Cite
|
Sign up to set email alerts
|

Effect of Postdeposition Oxidation and Subsequent Reduction Annealing on Electric and Optical Properties of Amorphous ZnO–SnO[sub 2] Transparent Conducting Films

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1

Citation Types

1
5
0

Year Published

2012
2012
2020
2020

Publication Types

Select...
8
1

Relationship

0
9

Authors

Journals

citations
Cited by 18 publications
(6 citation statements)
references
References 16 publications
1
5
0
Order By: Relevance
“…Thus, these Zn–Sn–O compounds could well be closest to experimental realization of disordered thermoelectrics. Highly conductive samples of amorphous (ZnO) x (SnO 2 ) 1– x alloys with σ in the range of 10 5 –10 6 S m –1 , and amorphous ZnSnO 3 samples with very high mobility (10–50 cm 2 V –1 s –1 ) have been reported. , These transport values are not too far from their crystalline counterparts. Although the TCOs provide an easier access to understanding amorphous thermoelectrics, the transparent character (or oxide composition) of these materials is not a necessity. As inexpensive, ubiquitous and technologically important materials, ZnO and ZnO-based compounds have also been explored for their thermoelectric behavior.…”
Section: Introductionmentioning
confidence: 99%
“…Thus, these Zn–Sn–O compounds could well be closest to experimental realization of disordered thermoelectrics. Highly conductive samples of amorphous (ZnO) x (SnO 2 ) 1– x alloys with σ in the range of 10 5 –10 6 S m –1 , and amorphous ZnSnO 3 samples with very high mobility (10–50 cm 2 V –1 s –1 ) have been reported. , These transport values are not too far from their crystalline counterparts. Although the TCOs provide an easier access to understanding amorphous thermoelectrics, the transparent character (or oxide composition) of these materials is not a necessity. As inexpensive, ubiquitous and technologically important materials, ZnO and ZnO-based compounds have also been explored for their thermoelectric behavior.…”
Section: Introductionmentioning
confidence: 99%
“…However, the effort for developing the indium-free oxide semiconductors have been continued for oxide TFTs due to the rare indium element based devices exhibiting the unceasing cost up tendency. Among them, Zn-Sn-O (ZTO) thin films attract much attention due to its wide band gap, high visible transmittance, good n-type electrical conductivity, as well as its cheapness [2]. Similar to IGZO, ZnO and SnO 2 can easily form an amorphous phase due to different crystal structures (ZnO: wurtzite, SnO 2 : rutile) [3].…”
mentioning
confidence: 99%
“…This depended somewhat on the oxygen partial pressure, as well as other parameters [28,29,30]. The electrical resistivity was in the range of 10 -2 to 10 2 -cm, depending on film thickness, substrate temperature, oxygen partial pressure, as well as the sputtering target used.…”
Section: A N-type Layermentioning
confidence: 99%