2011
DOI: 10.1016/j.ultramic.2011.06.007
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Effect of microscopic parameters on EBSD spatial resolution

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Cited by 116 publications
(69 citation statements)
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“…TKD method is also referred to as "transmission EBSD". The best planar resolution of electron back-scattered diffraction (EBSD) in conventional geometry is typically between 30 and 50 nm, and can be up to 200 nm in the perpendicular longitudinal (primary beam) direction, depending on the material and acceleration voltage [23]. For ultra-fine grained materials with grain size from few tens to hundreds of nanometers, the resolution of conventional EBSD is not sufficient since the interaction volume is comparable to the grain size.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…TKD method is also referred to as "transmission EBSD". The best planar resolution of electron back-scattered diffraction (EBSD) in conventional geometry is typically between 30 and 50 nm, and can be up to 200 nm in the perpendicular longitudinal (primary beam) direction, depending on the material and acceleration voltage [23]. For ultra-fine grained materials with grain size from few tens to hundreds of nanometers, the resolution of conventional EBSD is not sufficient since the interaction volume is comparable to the grain size.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…Many of these studies have been largely qualitative in nature [21] and complement analysis of out of plane slip through slip trace analysis [22]. [24], potential to scan large areas, easy access to complementary SEM imaging modes (e.g. electron channelling contrast image (ECCI) [25] and cathodoluminescence (CL) [26]), and the improvement in angular resolution makes HR-EBSD a powerful technique to study fatigue deformation process in polycrystalline materials.…”
Section: *Text Only Click Here To Download Text Only: Manuscript_jun_mentioning
confidence: 99%
“…Therefore, during the evaluation of real data, the cut-off introduced by the finite beam size should be considered in the analysis. Since the characteristic linear size of the illuminated volume (of about 10 Â 10 Â 50 nm 3 ) 23,24 can be of the same order of magnitude as the average dislocationdislocation spacing in a heavily deformed metal (of %30 nm for q % 10 15 m -2 ), the finite beam size could become a limiting factor for the application of the method.…”
mentioning
confidence: 99%