Effect of microfabrication defects on the performance of rarefaction gas-lubricated micro flexure pivot tilting pad gas bearing in power MEMS

Li, Wenjun; Liu, Wanhui; Feng, Kai

doi:10.1007/s00542-016-3155-1

Cited by 6 publications

(4 citation statements)

References 47 publications

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“…Figure 9(A) shows that the direct stiffness coefficients, K xx and K yy, are apparently increased with an increase in rotational speed. This finding is due to the improved aerodynamic effect by the high rotor speed 29 . For the cross‐coupling stiffness coefficients, K xy and K yx, their absolute values are increased with an increase in rotational speed.…”

Section: Numerical Analysismentioning

confidence: 91%

“…This finding is due to the improved aerodynamic effect by the high rotor speed. 29 For the cross-coupling stiffness coefficients, Kxy and Kyx, their absolute values are increased with an increase in rotational speed. However, this characteristic easily causes the bearings being unstable, which is not expected for designing the bearings with high rotational speed.…”

Section: Static State Analysismentioning

confidence: 98%

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Numerical and experimental investigation on the performance of hybrid porous gas journal bearings

Wang

Zhao

et al. 2020

Lubrication Science

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As the progress of the high-speed performance requirement for porous gas journal bearings continuing, the aerodynamic effect, which plays a key role in the state of lubrication, causes the porous gas journal bearings being gradually to be used as hybrid bearings. This paper firstly presents a theoretical analysis on the lubrication mechanism of the hybrid bearings. The gas flow in the porous and clearance is modelled by using the mass continuity equation. Two

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Section: Numerical Analysismentioning

confidence: 91%

Section: Static State Analysismentioning

confidence: 98%

Numerical and experimental investigation on the performance of hybrid porous gas journal bearings

Wang

Zhao

et al. 2020

Lubrication Science

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“…The reason for this difference can be attributed first to the misrepresentation of the squeeze film damping model, obtained from the Reynolds equation [41], when high excitation frequencies and amplitudes are applied, generating large squeeze parameter and increasing the Reynolds and Knudsen numbers [7]. In this case, Navier-Stokes equation with slipflow boundary conditions or Boltzmann equations should be used [50,51]. Second, the fact that the microbeam and the rigid mass are both surrounded by three rigid walls makes the modeling of the squeeze film damping challenging as shown in this figure.…”

Section: Response Around the First Principal Parametric Reson-mentioning

confidence: 99%

Parametric resonance of bi-directional axial loads shallow arch microresonators

Najar¹,

Ouakad²,

RAMINI³

et al. 2022

J. Micromech. Microeng.

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In this work, we investigate analytically and experimentally parametric resonances of an in-plane clamped-guided shallow arch microresonator. The arch is connected to a T-shaped moveable mass, which is sandwiched between two electrodes to electrostatically activate the device and to oﬀer bi-directional axial loads option. The device is tested under primary and secondary parametric resonances. In addition, an analytical model is presented taking into account the initial rise of the microbeam and the sliding motion at the guided side. The static and free vibration problems are solved using the Diﬀerential Quadrature Method, and the dynamic response is simulated using an assumed mode Galerkin approximation. The theoretical results of the static and dynamic behavior of the device are compared to experimental data showing good agreement. Moreover, we demonstrate the use of parametric excitation to signiﬁcantly amplify the axial motion. It is found that the second parametric resonance, corresponding to the fundamental mode of the arched microbeam, has a higher amplitude than the principal parametric case, due to the initial curvature of the beam. Thus, the proposed device can be a promising candidate for variety of sensing applications.

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“…The work showed that the solution of improved Reynolds equation has more accurate prediction of pressure distribution in the near transition flow regime. The effects of rarefaction and manufacturing defects on the linear and nonlinear bearing performances of micro flexure pivot tilting pad gas bearings were studied by Li et al [26], they emphasized the importance of pad preload on the dynamic characteristics of power MEMS. Wang et al [27] used the Greenwood-Williamson model and modified Reynolds equation to calculate the bearing force and asperity contact force, their studies concerned gas spiral groove thrust microbearing with different groove depth and standard deviation of asperity height.…”

Section: Introductionmentioning

confidence: 99%

Research on Static and Dynamic Characteristics of Gas-lubricated Microbearings for Microfluidic Devices

Liu

2020

Applied Sciences

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Aerodynamic journal microbearings with microtribological phenomena significantly influence the operating stability of microfluidic devices. The modified Reynolds equations including different rarefaction models are derived and are solved by the partial derivative method and relaxation iteration algorithm. The effects of Knudsen number and bearing parameters on the static and dynamic characteristics of microbearings are investigated in detail. The results show that the rarefaction effect plays a crucial role in the ultra-thin gas film lubrication. The maximum film pressure of Fukui–Kaneko (FK) model is lowest and the result in Boltzmann model is largest in small Knudsen number regions. As the Knudsen number increases further, the curve of FK model is coincident with that of the Boltzmann model in the transition regime. The direct stiffness coefficients of Boltzmann model increase with the increase of eccentricity ratio and aspect ratio, whereas the effect of Knudsen number on the damping coefficients yields a relatively complicated trend.

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Effect of microfabrication defects on the performance of rarefaction gas-lubricated micro flexure pivot tilting pad gas bearing in power MEMS

Cited by 6 publications

References 47 publications

Numerical and experimental investigation on the performance of hybrid porous gas journal bearings

Numerical and experimental investigation on the performance of hybrid porous gas journal bearings

Parametric resonance of bi-directional axial loads shallow arch microresonators

Research on Static and Dynamic Characteristics of Gas-lubricated Microbearings for Microfluidic Devices

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