Effect of metal target power on the properties of co-sputtered Sn-DLC and W-DLC thin films

Leal, Gabriela; Fraga, Mariana Amorim; Cardoso, Guilherme W. A.; Sobrinho, Argemiro Soares da Silva; Massi, M.

doi:10.1109/sbmicro.2015.7298111

“…The sp 3 -carbon/sp 2 hybridisation ratio of the DLC interface may be adjusted and controlled depending on the deposition process and conditions. DLC can also be doped to form conductive/semi -conductive materials to tailor them to a specific application, whether that be electronic [126], optical [127], mechanical [128] or biomedical [129] applications.…”

Section: Diamond-like Carbonmentioning

confidence: 99%

Carbon nanomaterials and their application to electrochemical sensors: a review

Power¹,

Gorey²,

Chandra³

et al. 2018

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Carbon has long been applied as an electrochemical sensing interface owing to its unique electrochemical properties. Moreover, recent advances in material design and synthesis, particularly nanomaterials, has produced robust electrochemical sensing systems that display superior analytical performance. Carbon nanotubes (CNTs) are one of the most extensively studied nanostructures because of their unique properties. In terms of electroanalysis, the ability of CNTs to augment the electrochemical reactivity of important biomolecules and promote electron transfer reactions of proteins is of particular interest. The remarkable sensitivity of CNTs to changes in surface conductivity due to the presence of adsorbates permits their application as highly sensitive nanoscale sensors. CNT-modified electrodes have also demonstrated their utility as anchors for biomolecules such as nucleic acids, and their ability to diminish surface fouling effects. Consequently, CNTs are highly attractive to researchers as a basis for many electrochemical sensors. Similarly, synthetic diamonds electrochemical properties, such as superior chemical inertness and biocompatibility, make it desirable both for (bio) chemical sensing and as the electrochemical interface for biological systems. This is highlighted by the recent development of multiple electrochemical diamond-based biosensors and bio interfaces.Keywords: bio sensors; carbon nanomaterials; carbon nanotubes; electrochemical sensing; synthetic diamond Users without a subscription are not able to see the full content. Please, subscribe or login to access all content.

show abstract

Carbon nanomaterials and their application to electrochemical sensors: a review

Power

¹

,

Chandra

²

,

Gorey³

et al. 2017

Nanotechnology Reviews

View full text Add to dashboard Cite

Carbon has long been applied as an electrochemical sensing interface owing to its unique electrochemical properties. Moreover, recent advances in material design and synthesis, particularly nanomaterials, has produced robust electrochemical sensing systems that display superior analytical performance. Carbon nanotubes (CNTs) are one of the most extensively studied nanostructures because of their unique properties. In terms of electroanalysis, the ability of CNTs to augment the electrochemical reactivity of important biomolecules and promote electron transfer reactions of proteins is of particular interest. The remarkable sensitivity of CNTs to changes in surface conductivity due to the presence of adsorbates permits their application as highly sensitive nanoscale sensors. CNT-modified electrodes have also demonstrated their utility as anchors for biomolecules such as nucleic acids, and their ability to diminish surface fouling effects. Consequently, CNTs are highly attractive to researchers as a basis for many electrochemical sensors. Similarly, synthetic diamonds electrochemical properties, such as superior chemical inertness and biocompatibility, make it desirable both for (bio) chemical sensing and as the electrochemical interface for biological systems. This is highlighted by the recent development of multiple electrochemical diamond-based biosensors and bio interfaces.

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An Approach on the Use of Co-sputtered W-DLC Thin Films as Piezoresistive Sensing Materials

Leal

¹

,

Furlan

²

,

Massi

³

et al. 2022

CMS

0

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Background: Miniaturized piezoresistive sensors, particularly strain gauges, pressure sensors, and accelerometers, have been used for measurements and control applications in various fields, such as automotive, aerospace, industrial, biomedical, sports, and many more. A variety of different materials have been investigated for the development of these sensors. Among them, diamond-like carbon (DLC) thin films have emerged as one of the most promising piezoresistive sensing materials due to their excellent mechanical properties, such as high hardness and high Young’s modulus. At the same time, metal doping has been studied to enhance its electrical properties. Objective: This article explores the use of co-sputtered tungsten-doped diamond-like carbon (W-DLC) thin films as microfabricated strain gauges or piezoresistors. Methods: Different serpentine thin-film resistors were microfabricated on co-sputtered W-DLC thin films using photolithography, metallization, lift-off, and RIE (reactive ion etching) processes. In order to evaluate their piezoresistive sensing performance, gauge factor (GF) measurements were carried out at room temperature using the cantilever beam method. Results: GF values obtained in this study for co-sputtered W-DLC thin films are comparable to those reported for W-DLC films produced and characterized by other techniques, which indicates the feasibility of our approach to use them as sensing materials in piezoresistive sensors. Conclusion: W-DLC thin films produced by the co-magnetron sputtering technique can be considered as sensing materials for miniaturized piezoresistive sensors due to the following key advantages: (i) easy and well-controlled synthesis method, (ii) good piezoresistive properties exhibiting a GF higher than metals, and (iii) thin-film resistors formed by a simple microfabrication process.

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Effect of metal target power on the properties of co-sputtered Sn-DLC and W-DLC thin films

Cited by 3 publications

References 9 publications

Carbon nanomaterials and their application to electrochemical sensors: a review

Carbon nanomaterials and their application to electrochemical sensors: a review

Carbon nanomaterials and their application to electrochemical sensors: a review

An Approach on the Use of Co-sputtered W-DLC Thin Films as Piezoresistive Sensing Materials

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