Effect of ion beam assistance on the microstructure of nonhydrogenated amorphous carbon

Rossi, François; André, Bernard; Veen, A. van; Mijnarends, P.E.; Schüt, H.; Delplancke, Marie Paule; Gissler, W.; Haupt, J.; Lucazeau, G.; Abello, L.

doi:10.1063/1.356164

Cited by 66 publications

(19 citation statements)

References 40 publications

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“…For a microstructure of nonhydrogenated amorphous carbon during IBAD, a model has been proposed, where small graphitic clusters are embedded in a strongly disordered mixture of sp 2 and sp 3 hybridized carbon. 16 With increasing substrate temperatures, the chemical bonding configuration varies distinctly. At elevated growth temperatures of 700 and 600°C, well separated G and D lines appear and G peaks shift to high frequencies.…”

Section: Discussionmentioning

confidence: 99%

Self-organized textured surfaces of amorphous carbon

Zhu

Narumi

et al. 2004

Journal of Applied Physics

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Articles you may be interested inSurface roughness of MgO thin film and its critical thickness for optimal biaxial texturing by ion-beam-assisted deposition Effect of pressure on the deposition of hydrogen-free amorphous carbon and carbon nitride films by the pulsed cathodic arc discharge method Effects of interface mixing on adhesion of amorphous carbon films synthesized by variable-energy direct carbon ion beam depositionWe report a simultaneous formation process of textured surfaces for hydrogen-free amorphous carbon (a-C) induced by an ion beam. By adjusting surface reactions via controlling temperature together with ion beams, several kinds of textured surfaces of a-C on mirror-polished Si ͑111͒ can be produced during ion-beam assisted deposition. In high-temperature regimes, submicron-sized pyramidlike a-C particles and ripples structures form. The sizes and separations of a-C particles change with substrate temperature significantly. An intrinsic model based on a natural self-organization mechanism is proposed for the production of textured surfaces, where the surface diffusion is shown to play a decisive role. In a low-temperature regime, the films commonly present mounding roughening. Likewise, self-organized nanodots appear at a very low ion flux. These nanodots are about 5Ϯ0.5 nm high with a diameter to height ratio close to 15:1 and a density of approximately 290 m Ϫ2 . The nanodot production is correlated with ion-induced nucleation. The demonstration of the textured surface formations may open a way to fabricate and tune desirable surface structures on the technically important functional materials.

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Section: Discussionmentioning

confidence: 99%

Self-organized textured surfaces of amorphous carbon

Zhu

Narumi

et al. 2004

Journal of Applied Physics

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“…This C-C signature, already observed in Si-C alloys with carbon excess, 42,50-53 corresponds certainly to a specific structure which could be described like a random covalent network of tetrahedral-trigonal bonding carbons with distorted bond angles and bond lengths. [54][55][56][57][58] As a matter of fact, at first, it has been shown 57 that in mixed sp 2 Ϫsp 3 bonded carbon layers, the overall Raman spectrum is dominated by the G component, because the cross section of the graphite stretching mode is much higher than that of the 1332 cm Ϫ1 diamond mode. Second, Raman spectrum calculations 54 have shown that the incorporation of a small amount of tetrahedral bonding atoms ͑5%-10%͒ into a sp 2 network produced a downward shift in the G peak.…”

Section: Raman Analysesmentioning

confidence: 99%

Structural characterization of amorphous SiCxNy chemical vapor deposited coatings

Bendeddouche

Berjoan

Bêche³

et al. 1997

Journal of Applied Physics

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High Seebeck effects from conducting polymer: Poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) based thin-film device with hybrid metal/polymer/metal architecture APL: Org. Electron. Photonics 5, 238 (2012) High Seebeck effects from conducting polymer: Poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) based thin-film device with hybrid metal/polymer/metal architecture Appl. Phys. Lett. 101, 173304 (2012) Response to "Comment on 'Silver/silicon dioxide/silver sandwich films in the blue-to-red spectral regime with negative-real refractive index'" [Appl. Phys. Lett. 101, 156101 (2012)] Appl. Phys. Lett. 101, 156102 (2012) On the determination of the glass forming ability of AlxZr1−x alloys using molecular dynamics, Monte Carlo simulations, and classical thermodynamics J. Appl. Phys. 112, 073508 (2012) Enhanced photoanode properties of epitaxial Ti doped α-Fe2O3 (0001) thin films Appl.Chemical bonding and local order around the different atoms of thick amorphous SiC x N y deposits ͓0.03рx/(xϩy)р0.67͔ prepared with chemical vapor deposition at 1000-1200°C using TMS-NH 3 -H 2 have been investigated using x-ray photoelectron spectroscopy ͑XPS͒, Raman spectrometry, Fourier transform infrared spectrometry ͑FT-IR͒, electron energy loss spectroscopy ͑EELS͒ and 29 Si magic-angle spinning nuclear magnetic resonance spectrometry ͑MAS-NMR͒. XPS analyses have shown that the main bonds are Si-C, Si-N, and C-C, and have suggested the existence of C-N bonds. According to Raman analyses and complementary FT-IR absorption of thin films, the coatings are nonhydrogenated. Si, C and N atomic chemical environments are more complicated than in a mixture of pure Si 3 N 4 -SiC phases. The examination of the Si KL 2,3 L 2,3 line shapes recorded by XPS have allowed one to state the existence of Si(C 4Ϫn N n ) units. Mixed coordination shells around silicon have been confirmed by EELS analyses. Additionally, FT-IR reflection analyses have proved that Si is both bonded with N and C. Indirect indication has been obtained owing to the 29 Si MAS-NMR analyses of powders. Raman analyses have been conclusive to assume that C-C bonds correspond to a mixed sp 3 Ϫsp 2 carbon configuration linked with Si(C 4Ϫn N n ) tetrahedra with 0рnр4.

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“…The band appearing in the 1300-1600 spectra region is related to C-C vibrational modes. This C-C signature already observed in Si-C alloys with carbon excess [24,[27][28][29][30] corresponds certainly to a specific structure which could be described like a random covalent network of tetrahedral-trigonal bonding carbons with distorted bond angles and bond lengths [31][32][33][34][35]. As a matter of fact, it shows that in mixed sp 2 -sp 3 bonded carbon layer, the overall Raman spectrum is dominated by the G component (E 2g Raman mode of perfect graphite crystal), because the cross section of the graphite stretching mode is much higher than that of the 1332 cm −1 diamond mode.…”

Section: Stucture Analysismentioning

confidence: 99%

Room-Temperature Growth of SiC Thin Films by Dual-Ion-Beam Sputtering Deposition

Chen

Zhuge

2008

Research Letters in Physical Chemistry

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Silicon carbide (SiC) films were prepared by single and dual-ion-beam sputtering deposition at room temperature. An assisted Ar + ion beam (ion energy Ei = 150 eV) was directed to bombard the substrate surface to be helpful for forming SiC films. The microstructure and optical properties of nonirradicated and assisted ion-beam irradicated films have been characterized by transmission electron microscopy (TEM), scanning electron microscopy (SEM), Fourier transform infrared spectroscopy (FTIR), and Raman spectra. TEM result shows that the films are amorphous. The films exposed to a low-energy assisted ion-beam irradicated during sputtering from a-SiC target have exhibited smoother and compacter surface topography than which deposited with nonirradicated. The ion-beam irradicated improves the adhesion between film and substrate and releases the stress between film and substrate. With assisted ion-beam irradicated, the density of the Si-C bond in the film has increased. At the same time, the excess C atoms or the size of the sp 2 bonded clusters reduces, and the a-Si phase decreases. These results indicate that the composition of the film is mainly Si-C bond.

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Effect of ion beam assistance on the microstructure of nonhydrogenated amorphous carbon

Cited by 66 publications

References 40 publications

Self-organized textured surfaces of amorphous carbon

Self-organized textured surfaces of amorphous carbon

Structural characterization of amorphous SiCxNy chemical vapor deposited coatings

Room-Temperature Growth of SiC Thin Films by Dual-Ion-Beam Sputtering Deposition

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