Fluorine (F)-doped, antimony (Sb)-doped, fluorine and antimony co-doped tin oxide (SnO 2 ) thin films were prepared by ultrasonic spray pyrolysis technique using SnCl 2 , NH 4 F and SbCl 3 as precursors of Sn, F and Sb elements respectively. F and Sb doping concentrations carried out from 1 to 20 wt% and 1 to 4 wt% in F-doped and Sb-doped SnO 2 films respectively. In F and Sb co-doped SnO 2 films, the proportions of F and Sb to Sn in starting solution were 15 and 2 wt% respectively. XRD patterns showed that the preferred orientation of SnO 2 :F, SnO 2 :Sb and SnO 2 :F,Sb is dependent on the doping concentration. The variation of doping concentration and preferred orientation of the films was reflected in their morphology as investigated by SEM. The electrical properties of the films were performed by Hall effect measurements in van der Pauw configuration. The minimum resistivity values of SnO 2 :F and SnO 2 :Sb were found in the films doped with 15 wt% of F and 2 wt% of Sb. However, The minimum of resistivity value of F and Sb co-doped SnO 2 films is not better than neither the one of F-doped nor the one of Sb-doped SnO 2 films. The optical transmission of SnO 2 :F films was found to increase with increasing in F doping concentration. Whereas the optical transmission of SnO 2 :Sb was found to decrease with increasing in Sb concentration. The F and Sb co-doped SnO 2 films annealed in three different conditions at 500 °C show the lower transmission values than the value obtained in the as-prepared SnO 2 :F,Sb films.