2011
DOI: 10.1016/j.mseb.2010.10.017
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Effect of heat treatment on microstructural and optical properties of CBD grown Al-doped ZnO thin films

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Cited by 54 publications
(19 citation statements)
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“…Other research groups adapted this technique in due course [15][16][17]. Subsequently, this technique has been employed for deposit- ing thin films of Al:ZnO [19]. The evaluation of optical dispersions and other optical constants of semiconductors are of considerable importance for applications in integrated optic devices such as switches, filters and modulators, etc., where the refractive index of a material is the key parameter for device design.…”
Section: Introductionmentioning
confidence: 99%
“…Other research groups adapted this technique in due course [15][16][17]. Subsequently, this technique has been employed for deposit- ing thin films of Al:ZnO [19]. The evaluation of optical dispersions and other optical constants of semiconductors are of considerable importance for applications in integrated optic devices such as switches, filters and modulators, etc., where the refractive index of a material is the key parameter for device design.…”
Section: Introductionmentioning
confidence: 99%
“…Extensive research work has been devoted recently to the preparation and characterization of ZnO: Al doped thin films, due to their large area of applications, such as transparent conductors, electronic devices, UV detectors, solar cells [1][2][3][4]. A significant improvement of the films conductivity has been achieved by doping with group III elements: B, Al, Ga, In.…”
Section: Introductionmentioning
confidence: 99%
“…[ 114 ] High performance ZnO:Al (AZO) fi lms with resistivity as low as 1-2 × 10 −4 Ω cm are deposited on industrial scale by magnetron sputtering [ 115 ] whereas ZnO:B (BZO) is grown by CVD. [ 116 ] Non-vacuum approaches for preparing conductive ZnO-based layers include sol-gel, [117][118][119] printing nanoparticle dispersions, [ 120,121 ] ED, [ 122 ] CBD, [123][124][125] SILAR, [126][127][128] and SP, [ 129 ] but high deposition or post-annealing temperatures of 300-600 °C are usually needed to achieve an adequate electrical resistivity in the range of low 10 −3 Ω cm. The solution growth of functional ZnO fi lms and nanostructures is reviewed by Lincot, [ 130 ] whereas the recent comprehensive review by Pasquarelli et al [ 131 ] summarizes available solution approaches for TCOs and alternative transparent conductors.…”
Section: Tco Front Contactmentioning
confidence: 99%