CAS 2011 Proceedings (2011 International Semiconductor Conference) 2011
DOI: 10.1109/smicnd.2011.6095789
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Micro-nanostructural and composition characterization of ZnO: Al doped films by SEM-EDX and HRTEM-EDX

Abstract: We present the results of a structural and compositional investigation of Al-doped thin films obtained by sol-gel deposition on Si/SiO 2 substrates. Taking into consideration the layer by layer deposition process and that the films contain 1-10 successive layers, the evolution of structure and elemental composition, especially Al concentration in the films were investigated by energy dispersive X-ray analyses in the scanning and high resolution transmission electron microscopy. Qualitative composition of the s… Show more

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Cited by 2 publications
(2 citation statements)
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“…Thus, a decrease in the Zn content (atomic and weight percentage) was observed in the EDS spectrum when compared with pure ZnO. In the case of oxygen EDS analysis, though the results coincide with the theoretically reported data for ZnO, [66] quantification of oxygen through EDS is difficult because of the presence of oxygen in the interstitial spaces between nanoparticles. [67] Although the dopant content can vary in the EDS measurements because of the average of individual measurements, [68] the doping concentration of the metals was around 1.0 % w/w and agreed with the theoretical content (1.0 %).…”
Section: Tem-eds Analysis Of Undoped and Doped Zno Npssupporting
confidence: 76%
“…Thus, a decrease in the Zn content (atomic and weight percentage) was observed in the EDS spectrum when compared with pure ZnO. In the case of oxygen EDS analysis, though the results coincide with the theoretically reported data for ZnO, [66] quantification of oxygen through EDS is difficult because of the presence of oxygen in the interstitial spaces between nanoparticles. [67] Although the dopant content can vary in the EDS measurements because of the average of individual measurements, [68] the doping concentration of the metals was around 1.0 % w/w and agreed with the theoretical content (1.0 %).…”
Section: Tem-eds Analysis Of Undoped and Doped Zno Npssupporting
confidence: 76%
“…The EDX spectrum provided the evidence for the presence of Zn-NPs in the chitosan solution after six months of storage. The presence of Zn L α, Zn K α , Zn K β and the O K α peak at about 1.01 keV, 8.8 keV, 9.7 keV and 0.250 keV respectively could be observed [31].…”
Section: Characterizationmentioning
confidence: 92%