Effect of filler behavior on nanocomposite SU8 photoresist for moving micro-parts

Jiguet, Sébastien; Judelewicz, Moshe; Mischler, S.; Bertch, A.; Renaud, Philippe

doi:10.1016/j.mee.2006.01.068

Cited by 47 publications

(41 citation statements)

References 8 publications

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“…Jiguet et al [3] have studied the effect of silica particle reinforcement of SU-8 and heat treatment of SU-8. The improvements in tribology from silica reinforcement and heat treatment are very marginal, but the heat treatment improved mechanical properties considerably.…”

Section: Open Accessmentioning

confidence: 99%

SU-8 Composite Based “Lube-tape” for a Wide Range of Tribological Applications

2014

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Abstract:In a previous work, we have developed a perflouropolyether (PFPE) lubricant droplet-filled SU-8 composite which promotes bonding between the molecules of SU-8 and PFPE and provides excellent boundary lubrication. The SU-8 + PFPE composite has enhanced the wear durability of SU-8 by more than four orders of magnitude. In this work, the same SU-8 + PFPE composite was used to fabricate a stand-alone laminate film called "Lube-tape". It has integrated two layers of approximately 90 microns thickness each; the top layer is made of SU-8 + PFPE composite and the bottom layer of pristine SU-8. Thus, a single tape can have drastically contrasting high friction and low friction properties on its two surfaces. The composite side has the initial coefficient of friction ~7 times lower and the wear life more than four orders of magnitude than those of the pristine SU-8 side. This lube tape can be used on any load bearing surface to improve the tribological performance by simply pasting the pristine SU-8 side onto the substrate.

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Section: Open Accessmentioning

confidence: 99%

SU-8 Composite Based “Lube-tape” for a Wide Range of Tribological Applications

2014

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“…7 Compared to the Si MEMS technology, SU-8 MEMS technology is relatively new, 12 and the solutions to extend the wear life of SU-8 polymer are in the exploratory stage. Jiguet et al 13 made SU-8 polymer nanocomposites and reported that the friction reduced by 3.5 times when compared to the unreinforced SU-8 material against soft polymeric balls (polyoxymethylene balls). 13 However, no improvement was observed when the composites were slid against steel balls.…”

Section: Introductionmentioning

confidence: 99%

“…Jiguet et al 13 made SU-8 polymer nanocomposites and reported that the friction reduced by 3.5 times when compared to the unreinforced SU-8 material against soft polymeric balls (polyoxymethylene balls). 13 However, no improvement was observed when the composites were slid against steel balls. 13 Recently, we applied a surface modification method to SU-8 thin/thick films coated on Si wafers, which considerably reduced the friction and increased the wear life of Si and SU-8 polymer.…”

Section: Introductionmentioning

confidence: 99%

“…13 However, no improvement was observed when the composites were slid against steel balls. 13 Recently, we applied a surface modification method to SU-8 thin/thick films coated on Si wafers, which considerably reduced the friction and increased the wear life of Si and SU-8 polymer. 8 In this method, oxygen plasma was used to chemically activate the films and bind perfluoropolyether (PFPE) nanolubricant molecules to their surfaces.…”

Section: Introductionmentioning

confidence: 99%

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Surface chemical modification for exceptional wear life of MEMS materials

2011

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Micro-Electro-Mechanical-Systems (MEMS) are built at micro/nano-scales. At these scales, the interfacial forces are extremely strong. These forces adversely affect the smooth operation and cause wear resulting in the drastic reduction in wear life (useful operating lifetime) of actuator-based devices. In this paper, we present a surface chemical modification method that reduces friction and significantly extends the wear life of the two most popular MEMS structural materials namely, silicon and SU-8 polymer. The method includes surface chemical treatment using ethanolamine-sodium phosphate buffer, followed by coating of perfluoropolyether (PFPE) nanolubricant on (i) silicon coated with SU-8 thin films (500 nm) and (ii) MEMS process treated SU-8 thick films (50 μm). After the surface chemical modification, it was observed that the steady-state coefficient of friction of the materials reduced by 4 to 5 times and simultaneously their wear durability increased by more than three orders of magnitude (> 1000 times). The significant reduction in the friction coefficients is due to the lubrication effect of PFPE nanolubricant, while the exceptional increase in their wear life is attributed to the bonding between the -OH functional group of ethanolamine treated SU-8 thin/thick films and the -OH functional group of PFPE. The surface chemical modification method acts as a common route to enhance the performance of both silicon and SU-8 polymer. It is time-effective (process time ≤ 11 min), cost-effective and can be readily integrated into MEMS fabrication/assembly processes. It can also work for any kind of structural material from which the miniaturized devices are/can be made.

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“…For instance, the actuation voltage needed for a SU-8 electrostatic actuator can be reduced due to the lower Young's modulus. Electrical [27], magnetic [28], optical [29,30], or mechanical properties [31,32] of the free-standing part can be tuned by mixing the resist with the corresponding functional materials.…”

Section: Introductionmentioning

confidence: 99%

SU‐8 as a structural material for labs‐on‐chips and microelectromechanical systems

et al. 2007

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Since its introduction in the nineties, the negative resist SU-8 has been increasingly used in micro- and nanotechnologies. SU-8 has made the fabrication of high-aspect ratio structures accessible to labs with no high-end facilities such as X-ray lithography systems or deep reactive ion etching systems. These low-cost techniques have been applied not only in the fabrication of metallic parts or molds, but also in numerous other micromachining processes. Its ease of use has made SU-8 to be used in many applications, even when high-aspect ratios are not required. Beyond these pattern transfer applications, SU-8 has been used directly as a structural material for microelectromechanical systems and microfluidics due to its properties such as its excellent chemical resistance or the low Young modulus. In contrast to conventional resists, which are used temporally, SU-8 has been used as a permanent building material to fabricate microcomponents such as cantilevers, membranes, and microchannels. SU-8-based techniques have led to new low-temperature processes suitable for the fabrication of a wide range of objects, from the single component to the complete lab-on-chip. First, this article aims to review the different techniques and provides guidelines to the use of SU-8 as a structural material. Second, practical examples from our respective labs are presented.

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Effect of filler behavior on nanocomposite SU8 photoresist for moving micro-parts

Cited by 47 publications

References 8 publications

SU-8 Composite Based “Lube-tape” for a Wide Range of Tribological Applications

SU-8 Composite Based “Lube-tape” for a Wide Range of Tribological Applications

Surface chemical modification for exceptional wear life of MEMS materials

SU‐8 as a structural material for labs‐on‐chips and microelectromechanical systems

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