2005
DOI: 10.2116/analsci.21.757
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Effect of Energy Dependence of Primary Beam Divergence on the X-ray Standing Wave Characterization of Layered Materials

Abstract: Incident primary beam divergence is a source of systematic error in X-ray standing wave (XSW) characterization of single and multilayer thin films. Primary beam divergence significantly alters the XSW profile of a layered material and can lead to large errors when used with higher excitation energies. The present study suggests that when one uses Mo-Kα excitation, the primary beam divergence should be in range of 0.005 0 . On the other hand, in the case of Cu-Kα excitation, primary beam divergence can be relax… Show more

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Cited by 11 publications
(6 citation statements)
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References 33 publications
(30 reference statements)
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“…The normalized x-ray field intensity I j (θ, Z ) in layer j of a multilayer structure consisting of n layers, at depth Z is given by [15]…”
Section: Theoretical Backgroundmentioning
confidence: 99%
See 1 more Smart Citation
“…The normalized x-ray field intensity I j (θ, Z ) in layer j of a multilayer structure consisting of n layers, at depth Z is given by [15]…”
Section: Theoretical Backgroundmentioning
confidence: 99%
“…The microstructural properties such as layer thickness, interface roughness, interlayer formation etc of the layered materials is usually determined from the x-ray reflectivity (XRR) [8], x-ray diffuse scattering [9] and from the x-ray standing wave (XSW) induced fluorescence measurements [10][11][12][13][14][15]. The XRR technique, in combination with the x-ray diffuse scattering measurements, has shown to be a very powerful technique for the determination of correlated and un-correlated (random) interfacial roughness effects in a multilayer stack [16][17][18].…”
Section: Introductionmentioning
confidence: 99%
“…To the best of our knowledge no reports show XSW measurements on Co/Si system to study the nature of its interface. For the theoretical fitting [18] of this data, we have considered two models.…”
Section: X-ray Standing Wavementioning
confidence: 99%
“…The normalized X-ray field intensity I j (θ , Z), in layer j, of a multilayer structure, at depth Z is given by [20] :…”
Section: Theoretical Backgroundmentioning
confidence: 99%