Characterization of trace embedded impurities in thin multilayer structures using synchrotron X‐ray standing waves

Tiwari, M. K.; Sawhney, Kawal; Lodha, G. S.

doi:10.1002/sia.3178

Cited by 9 publications

(7 citation statements)

References 23 publications

(20 reference statements)

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“…Tiwari and co-workers used intense synchrotron X-rays for X-ray standing wave analysis of a periodic molybdenum/silicon multilayer sample. 310 Various trace contaminants (Cr, Fe, Ni and W) that had been unintentionally embedded in the sample during the deposition process were determined. The determination of the concentrations of these contaminants enabled the deposition process to be optimised and also enabled the authors to correlate the measured optical properties of the sample with theoretical models.…”

Section: X-ray-based Applicationsmentioning

confidence: 99%

Atomic spectrometry update. Industrial analysis: metals, chemicals and advanced materials

Carter

Fisher

Goodall

et al. 2010

J. Anal. At. Spectrom.

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Section: X-ray-based Applicationsmentioning

confidence: 99%

Atomic spectrometry update. Industrial analysis: metals, chemicals and advanced materials

Carter

Fisher

Goodall

et al. 2010

J. Anal. At. Spectrom.

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“…The performance of a nanostructured device strongly depends on its microstructural properties . The presence of any unwanted impurity even at the micro or trace level may lead to change in the physical properties and may deteriorate the overall performance of a nanostructured device . The quantitative analysis of nanomaterials is often very critical because currently most frequently used methods are not very robust; moreover, it requires high spatial resolution for a nano‐probe method (of the order of sub‐nanometer length scale) in order to distinguish internal structure of a nanostructured composite thin‐layered medium.…”

Section: Introductionmentioning

confidence: 99%

“…On the other hand, the GIXRF technique provides information about the non‐reflecting layers as well as for the reflecting layers. Therefore, in many cases, it not possible to completely reveal the structure of a complex nanostructured thin film medium that comprises of both reflecting and nonreflecting layers, using only one of the techniques (XRR or GIXRF) . The inherent characteristic features of the GIXRF technique allow us to even analyze multi‐element nanostructured materials and obtain useful information on the nature of nanoparticle dispersion, average particle size, shape of the particles as well as their agglomeration (if any), and chemical composition over a large surface area of the substrate .…”

Section: Introductionmentioning

confidence: 99%

Probing nanostructured materials using X‐ray fluorescence analysis

et al. 2017

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Dispersion of metal nanoparticles on flat surfaces has attracted considerable interest in many technological applications. Numerous advantages of functionalized patterned nanostructures especially in medical physics, chemistry, biology, and semiconductor quantum dot applications have rapidly driven the growth of this field in the last two decades. In particular, for applications involving biomedical imaging, the nanoparticles have attracted perhaps the greatest attention as these materials provide a direct interface at the subcellular length scale. Reliable characterization methods are thus often needed to infer their detailed structural properties such as average particle size, particle shape, internal structure, surface morphology, distribution of particles, and their chemical composition. As a nondestructive probe, X-ray fluorescence measurements at grazing incidence provide sensitive information about the physical and chemical nature of the nanoparticles over the large surface area of a substrate. Herein, we demonstrate the potential capabilities of the X-ray fluorescence technique for reliable and precise determination of surface morphology of metal nanoparticles, dispersed on a flat surface. Our results show that X-ray standing wave assisted fluorescence measurements are markedly sensitive to the nature of dispersion of nanoparticles on a substrate surface. We have analyzed different types of nanostructured materials; e.g. a W thin film structure and Au nanoparticles deposited on a Si surface. The average size of the Au nanoparticles estimated, using X-ray standing wave fluorescence analysis, was found to closely agree with the atomic force microscopy measurements. The inherent features of the X-ray fluorescence technique permit us to analyze distribution of all kinds of metal and metalloid nanoparticles on a flat surface.

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“…The X-ray standing wave (XSW) technique 1,2 is applied to non-destructively reconstruct the atomic profiles in crystals and in periodic [3][4][5][6][7] or aperiodic stratified structures 3,4,[8][9][10] . The technique is based on the measurement and analysis of the characteristic signal from specific atoms excited by the XSW formed inside a structure.…”

Section: Introductionmentioning

confidence: 99%

Model independent x-ray standing wave analysis of periodic multilayer structures

Yakunin

Makhotkin

Чуев

et al. 2014

Journal of Applied Physics

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We present a model independent approach for the reconstruction of the atomic concentration profile in a nanoscale layered structure, as measured using the X-ray fluorescence yield modulated by an X-ray standing wave (XSW). The approach is based on the direct regularized solution of the system of linear equations that characterizes the fluorescence yield. The suggested technique was optimized for, but not limited to, the analysis of periodic layered structures where the XSW is formed under Bragg conditions.The developed approach was applied to the reconstruction of the atomic concentration profiles for LaN/BN multilayers with 50 periods of 35Å thick layers. The object is especially difficult to analyse with traditional methods, as the estimated thickness of the interface region between the constituent materials is comparable to the individual layer thicknesses. However, using the suggested technique it was possible to reconstruct the La atomic profile, showing that the La atoms stay localized within the LaN layers and interfaces and do not diffuse into the BN layer. The atomic distributions were found with an accuracy of 1Å. The analysis of the Kr fluorescence yield showed that Kr atoms originating from the sputter gas are trapped in both the LaN -on-BN and the BN -on-LaN interfaces. PACS numbers: 61.46.-w, 41.50.+h, 61.05.-a I.

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Characterization of trace embedded impurities in thin multilayer structures using synchrotron X‐ray standing waves

Cited by 9 publications

References 23 publications

Atomic spectrometry update. Industrial analysis: metals, chemicals and advanced materials

Atomic spectrometry update. Industrial analysis: metals, chemicals and advanced materials

Probing nanostructured materials using X‐ray fluorescence analysis

Model independent x-ray standing wave analysis of periodic multilayer structures

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