a b s t r a c tUnusual features of phase transformations under the thermal treatment of the thin films system Cu (80 nm)-Sn (20 nm) have been studied using a range of physical methods. Processes of mass transfer in thin layers were studied and regimes of thermal treatment were chosen to compare the influence of different temperatures for a given time and the influence of annealing time at a fixed temperature. Presence of the intermetallic phase Cu 6 Sn 5 in the as-deposited state and its transformation into Cu 3 Sn phase after annealing at temperature 373 K for different times has been identified by grazing incidence X-ray diffraction. Annealing at a temperature of 473 K, and higher, leads to the formation, unexpectedly, of the Cu 4 Sn phase. The concentration distribution of tin through the depth of the sample was obtained by Rutherford backscattering spectroscopy and demonstrated the existence of the Cu 4 Sn composition. The topography of the surface of the samples was determined with atomic-force microscopy.