FeRhN(∼50 nm)/NiFe(∼5 nm) laminated thin films were deposited by dc magnetron sputtering. Upon optimizing the sputtering conditions, FeRhN/NiFe laminated thin films showed good soft magnetic properties, and a well defined uniaxial anisotropy: Bs∼20.3 kG, Hc<1.0 Oe, Hk∼5 Oe. It was shown that a NiFe underlayer improved the soft magnetic properties of a FeRhN layer more effectively than a NiFe top layer. The data obtained by x-ray diffraction study showed that the FeRhN film with a NiFe underlayer had a much stronger (110) texture, as compared to single layer FeRhN film. Columnar grain structure with size of about 10 nm was observed in FeRhN films by high resolution transmission electron microscope. It is believed that the modification of FeRhN microstructure by NiFe underlayer plays a more important role in improving the soft magnetic properties than the exchange coupling between the FeRhN and NiFe layers.