2019
DOI: 10.1016/j.solmat.2019.109970
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Easy-to-apply methodology to measure the hydrogen concentration in boron-doped crystalline silicon

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Cited by 37 publications
(39 citation statements)
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“…We found that the misfit between experiment and simulation could be overcome by either increasing the total hydrogen concentration or decreasing the LeTID precursor concentration. The former would mean that the hydrogen concentration in the wafer is higher than expected from experiments [44]. As a consequence of the latter, the electron capture cross section σ e would have to be larger than 5 × 10 −14 cm −2 (and hence larger than that of all other defects) in order to explain observed very low lifetime values.…”
Section: Temporary Recoverymentioning
confidence: 87%
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“…We found that the misfit between experiment and simulation could be overcome by either increasing the total hydrogen concentration or decreasing the LeTID precursor concentration. The former would mean that the hydrogen concentration in the wafer is higher than expected from experiments [44]. As a consequence of the latter, the electron capture cross section σ e would have to be larger than 5 × 10 −14 cm −2 (and hence larger than that of all other defects) in order to explain observed very low lifetime values.…”
Section: Temporary Recoverymentioning
confidence: 87%
“…The starting conditions in the simulation, i.e., the total hydrogen concentration and, in particular, the relative share of the different hydrogen complexes have a significant impact on the LeTID dynamics. In order to begin with a realistic estimation, a firing process was emulated: A total hydrogen concentration [H] tot of 1 × 10 15 cm −3 (which is in the range of an expected concentration after a typical firing step [44]) was assumed to be in dissociated state at the peak temperature of 750°C. The redistribution of hydrogen to the different complexes was simulated for a cool-down rate of 100 K/s down to room temperature.…”
Section: Numerical Simulationsmentioning
confidence: 99%
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“…In solar cells, the bulk H content has previously been estimated using Fourier Transform-IR (FT-IR) measurements via the reduction of hydrogen in the ARC after firing 18 or indirectly by its effect on the resistivity. 45 The first approach monitored changes in the IR absorption features due to Si-N, Si-H, and N-H before and after the firing process. In the second approach, the changes in the resistivity were assumed to arise from the conversion of hidden hydrogen, i.e., hydrogen in dimeric states that give weak or no IR absorbance, into monatomic H + which could then neutralize B dopants.…”
Section: Introductionmentioning
confidence: 99%
“…In the second approach, the changes in the resistivity were assumed to arise from the conversion of hidden hydrogen, i.e., hydrogen in dimeric states that give weak or no IR absorbance, into monatomic H + which could then neutralize B dopants. 8,34,45 One requires typically high concentrations of light-element impurities, e.g., 10 18 cm −3 in a 1-μm thick layer or 10 14 cm −3 in a 1 cm thick layer, in a bulk sample and measurements at cryogenic temperatures to detect their LVMs. 37 For silicon, it is also important to have surfaces polished to optical quality to reduce light scattering.…”
Section: Introductionmentioning
confidence: 99%