Dynamic spatial pulse shaping via a digital micromirror device for patterned laser-induced forward transfer of solid polymer films

Abstract

Abstract:We present laser-induced forward transfer of solid-phase polymer films, shaped using a Digital Micromirror Device (DMD) as a variable illumination mask. Femtosecond laser pulses with a fluence of 200-380 mJ/cm 2 at a wavelength of 800 nm from a Ti:sapphire amplifier were used to reproducibly transfer thin films of poly(methyl methacrylate) as small as ~30 µm by ~30 µm with thickness ~1.3 µm. This first demonstration of DMD-based solid-phase LIFT shows minimum feature sizes of ~10µm.

Laser-induced backward transfer of nanoimprinted polymer elements

“…Pulse energies were adjusted to investigate the threshold for optimum LIBT, while the sample and image position were monitored with a CMOS camera, a white light source and a dichroic mirror. Further details of this setup can be found in a previous study [7]. Donors were fabricated via spin coating of S1813 and SU-8 photoresists onto cleaned carrier substrates, and baked on a hotplate at 110°C for 5 min.…”

“…Recent results have shown the lateral shaping of deposits in a dynamic fashion for laser-induced forward transfer (LIFT), via the use of a digital micromirror device (DMD) acting as a spatial light modulator [6,7], hence enabling the rapid prototyping of complex shapes with micron-scale fabrication resolution. This approach provides a more flexible alternative to focussing or imaging of an aperture [8,9] and complements alternative beam-shaping approaches previously used for LIFT, which assist in the pre-machining of the donor for transfer of structures with small dimensions [10], smooth side walls [11] or reduced amount of debris [12].…”

Investigations on laser printing of microcapacitors using poly (methyl methacrylate) dielectric thin films for organic electronics applications

“…a dynamic release layer (DRL) [3,8,12,13], or by using a specially designed printing system, i.e. smart beam shaping (SBS) technique [14][15][16], liquid-crystal spatial light modulators (SLM) or digital micromirror devices (DMD) [17][18][19]. Furthermore, by downscaling such laser printing techniques, nanometer-size objects can be printed, e.g.…”

Rapid Fabrication of Hydrogel Microstructures Using UV-Induced Projection Printing

“…Laser-induced forward transfer (LIFT) [29] is a simple, direct writing technique that has been used for the deposition of a variety of materials (e.g., metals, liquids, powders, and various polymers) onto various substrates, and which is also suited to the patterning and fabrication of microstructures. The limitations to this process are that the laser energy fluence must be accurately controlled so as to only transfer the coating materials, and that it does not easily provide good uniformity or morphology [30]. Inkjet printing [31][32][33] can fabricate 3D microstructures with flexibility and low-cost, but does not allow for easy control over the size, shape or physiochemical properties.…”