2016
DOI: 10.1007/s00339-016-9953-6
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Laser-induced backward transfer of nanoimprinted polymer elements

Abstract: Femtosecond laser-induced backward transfer of transparent photopolymers is demonstrated in the solid state, assisted by a digital micromirror spatial light modulator for producing shaped deposits. Through use of an absorbing silicon carrier substrate, we have been able to successfully transfer solid-phase material, with lateral dimensions as small as *6 lm. In addition, a carrier of silicon incorporating a photonic waveguide relief structure enables the transfer of imprinted deposits that have been accomplish… Show more

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Cited by 24 publications
(14 citation statements)
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“…It was assumed that the use of such a scheme would lead to the appearance of microstructures on the back surface of the quartz plate in the form of a kind of "print". Previously, similar structures were formed in polyimide films [24,25].…”
Section: Methodssupporting
confidence: 57%
“…It was assumed that the use of such a scheme would lead to the appearance of microstructures on the back surface of the quartz plate in the form of a kind of "print". Previously, similar structures were formed in polyimide films [24,25].…”
Section: Methodssupporting
confidence: 57%
“…both additive [185][186][187][188][189] and subtractive [190][191][192][193][194] laser-based manufacturing.…”
Section: Deep Learningmentioning
confidence: 99%
“…The laser ablation of the coatings was performed using the laser-machining center equipped with the solidstate pulsed optical fiber Laser 600 GF by Agie Charmilles with the output power of 50 W and the pulse length of 90 ns [20][21][22].…”
Section: Methodsmentioning
confidence: 99%