2006
DOI: 10.1088/0960-1317/16/8/037
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Dynamic properties of AFM cantilevers and the calibration of their spring constants

Abstract: A hybrid method is introduced for the calibration of the spring constants of atomic force microscopy cantilevers. It is based on the minimization of the difference between the modelled and experimentally determined full-field displacement maps of the surface of the cantilever in motion at several resonant frequencies. The dynamic mechanical response of the cantilever to periodic motion is measured in a vacuum by means of a scanning vibrometer. Given the dimensions of the cantilever, the obtained surface displa… Show more

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Cited by 69 publications
(40 citation statements)
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“…Many methods, including the dynamic method (forced and thermal oscillation), static loading and FEA methods were widely used to calibrate the stiffness of the cantilever [33]. In [34], a hybrid method is introduced for the calibration of the spring constants of atomic force microscopy cantilevers.…”
Section: Calibration Of the Microcantilevermentioning
confidence: 99%
“…Many methods, including the dynamic method (forced and thermal oscillation), static loading and FEA methods were widely used to calibrate the stiffness of the cantilever [33]. In [34], a hybrid method is introduced for the calibration of the spring constants of atomic force microscopy cantilevers.…”
Section: Calibration Of the Microcantilevermentioning
confidence: 99%
“…A hybrid solution was presented by Mendels et al basing on the analysis of the probes oscillations profiles, acquired with vibrometer at base and higher resonance frequencies in the vacuum [122]. Obtained data was combined with finite elements modeling, in order to resolve the physical properties of the probe.…”
Section: Combined Method: Scanning Vibrometer and Feamentioning
confidence: 99%
“…Forced oscillation was employ to determine the thickness t of the cantilever. If we know the resonant frequencies of the cantilever, t can be obtained by [26]:…”
Section: B Normal Force Calibrationmentioning
confidence: 99%