Drive-Mode Control for Vibrational MEMS Gyroscopes

Dong, Lili; Avanesian, David

doi:10.1109/tie.2008.2010088

Cited by 67 publications

(3 citation statements)

References 20 publications

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“…Âûñîêèå òðåáîâàíèÿ ê ñòàáèëüíîñòè ðàáîòû ðåçîíàíñíûõ äàò÷èêîâ (â ÷àñòíîñòè -÷óâñòâèòåëüíûõ ýëåìåíòîâ ìèêðîýëåêòðîìåõàíè÷åñêèõ âèáðàöèîííûõ ãèðîñêîïîâ) ïðèâîäÿò ê íåîáõîäèìîñòè ïðèìåíåíèÿ ñèñòåì óïðàâëåíèÿ ñ îáðàòíîé ñâÿçüþ, îáåñïå÷èâàþùèõ ïîñòîÿíñòâî àìïëèòóäû êîëåáàíèé ðåçîíàòîðà è åãî ÷àñòîòíóþ íàñòðîéêó íà ðåçîíàíñ. Ïåðâàÿ èç íàçâàííûõ çàäà÷, êàê ïðàâèëî, ðåøàåòñÿ ñ ïîìîùüþ ñèñòåìû àâòîìàòè÷åñêîé ðåãóëèðîâêè óñèëåíèÿ [1,2,3,4]. Äëÿ ðåøåíèÿ âòîðîé çàäà÷è øèðîêîå ðàñïðîñòðàíåíèå ïîëó÷èëè ñèñòåìû ôàçîâîé àâòîïîäñòðîéêè ÷àñòîòû [5,6,7,8,9,10,11,12,13,14,15,16].…”

Section: ââåäåíèåunclassified

Nonlinear Dynamics of the Primary Oscillation Circuit of a Mems Gyroscope Under the Action of Phase-locked Loop and Automatic Gain Control Systems

Igumnova,

Lukin,

Popov

et al. 2023

Differential Equations and Control Processes

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In this work, we study the dynamics of primary oscillations of a high-Q micromechanical resonator - a sensitive element of an RR-type MEMS gyroscope - under the action of various implementations of a phase-locked loop system operating in conjunction with an automatic gain control system for an electrostatic drive. The study of the dynamics of the object is carried out both numerically and analytically - using the averaging method. Conditions for the stability of a stationary regime in a linear approximation are obtained. The questions of accuracy of various methods of numerical solution of differential equations of the circuit of primary oscillations are considered. The influence of the mechanical nonlinearity of the resonator on the dynamics of the resonator and the control system has been studied. An implementation of a low-order PLL circuit that does not contain a double-frequency spurious signal at the output of the phase detector is proposed. The output characteristics of control systems (speed, capture bandwidth, etc.) are analyzed and qualitative conclusions are drawn about the features of the interaction between the dynamics of a mechanical oscillatory link and the PLL-ARC circuit.

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Section: ââåäåíèåunclassified

Nonlinear Dynamics of the Primary Oscillation Circuit of a Mems Gyroscope Under the Action of Phase-locked Loop and Automatic Gain Control Systems

Igumnova,

Lukin,

Popov

et al. 2023

Differential Equations and Control Processes

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“…Therefore, it is widely used in electronic products, the aerospace industry, defense industry weapons, industrial robots, etc. [ 2 , 3 , 4 ]. The hemispherical resonator is located inside the gyroscope and its accuracy directly determines the performance of the gyroscope [ 5 ].…”

Section: Introductionmentioning

confidence: 99%

Processing Optimization of Shear Thickening Fluid Assisted Micro-Ultrasonic Machining Method for Hemispherical Mold Based on Integrated CatBoost-GA Model

et al. 2023

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Micro-electro-mechanical systems (MEMS) hemispherical resonant gyroscopes are used in a wide range of applications in defense technology, electronics, aerospace, etc. The surface roughness of the silicon micro-hemisphere concave molds (CMs) inside the MEMS hemispherical resonant gyroscope is the main factor affecting the performance of the gyroscope. Therefore, a new method for reducing the surface roughness of the micro-CM needs to be developed. Micro-ultrasonic machining (MUM) has proven to be an excellent method for machining micro-CMs; shear thickening fluids (STFs) have also been used in the ultra-precision polishing field due to their perfect processing performance. Ultimately, an STF-MUM polishing method that combines STF with MUM is proposed to improve the surface roughness of the micro-CM. In order to achieve the excellent processing performance of the new technology, a Categorical Boosting (CatBoost)-genetic algorithm (GA) optimization model was developed to optimize the processing parameters. The results of optimizing the processing parameters via the CatBoost-GA model were verified by five groups of independent repeated experiments. The maximum absolute error of CatBoost-GA is 7.21%, the average absolute error is 4.69%, and the minimum surface roughness is reduced by 28.72% compared to the minimum value of the experimental results without optimization.

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“…High requirements for the stability of the operation of resonant sensors (in particular, the sensitive elements of microelectromechanical vibration gyroscopes) lead to the need to use feedback control systems that ensure the constancy of the oscillation amplitude of the resonator and its frequency tuning to resonance. The first of these tasks, as a rule, is solved using the automatic gain control (AGC) system [1][2][3][4]. To solve the second problem, phase-locked loop (PLL) systems [5][6][7] are widely used.…”

Section: Introductionmentioning

confidence: 99%

Nonlinear Dynamics of MEMS Resonator in PLL-AGC Self-Oscillation Loop

Лукин¹,

Indeitsev²,

Popov³

et al. 2020

Preprint

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The work is devoted to the study of a MEMS resonator dynamics under the action of phase-locked and automatic gain control loops. Particular attention is directed to the study of the nonlinearity factor of the resonator elastic restoring force. It was found that the determination of control system parameters based on the stability analysis of the operating resonant mode, in the general case, does not provide the required phase adjustment and stabilization of the oscillation amplitude. Stable multifrequency modes of oscillations are found, an analytical study of the mechanisms of their appearance and evolution is carried out under variation of the key parameters of the system. The real regions of the control system stable operation are determined (which do not coincide, as was found, with the regions of stability of the operating resonant mode, due to the presence of hidden attractors in the phase space of the system). A methodology has been developed for identifying such areas of stable operation. A significant complication of the structure of possible motions in the system with an increase in the Q-factor of the resonator is revealed.

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Drive-Mode Control for Vibrational MEMS Gyroscopes

Cited by 67 publications

References 20 publications

Nonlinear Dynamics of the Primary Oscillation Circuit of a Mems Gyroscope Under the Action of Phase-locked Loop and Automatic Gain Control Systems

Nonlinear Dynamics of the Primary Oscillation Circuit of a Mems Gyroscope Under the Action of Phase-locked Loop and Automatic Gain Control Systems

Processing Optimization of Shear Thickening Fluid Assisted Micro-Ultrasonic Machining Method for Hemispherical Mold Based on Integrated CatBoost-GA Model

Nonlinear Dynamics of MEMS Resonator in PLL-AGC Self-Oscillation Loop

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