2023
DOI: 10.3390/ma16072683
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Processing Optimization of Shear Thickening Fluid Assisted Micro-Ultrasonic Machining Method for Hemispherical Mold Based on Integrated CatBoost-GA Model

Abstract: Micro-electro-mechanical systems (MEMS) hemispherical resonant gyroscopes are used in a wide range of applications in defense technology, electronics, aerospace, etc. The surface roughness of the silicon micro-hemisphere concave molds (CMs) inside the MEMS hemispherical resonant gyroscope is the main factor affecting the performance of the gyroscope. Therefore, a new method for reducing the surface roughness of the micro-CM needs to be developed. Micro-ultrasonic machining (MUM) has proven to be an excellent m… Show more

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Cited by 3 publications
(2 citation statements)
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“…CatBoost incorporates all the settings needed to build separate decision trees and set up the random forest. The literature [41][42][43] can be referenced for further information about CatBoost.…”
Section: Categorical Boosting (Catboost)mentioning
confidence: 99%
“…CatBoost incorporates all the settings needed to build separate decision trees and set up the random forest. The literature [41][42][43] can be referenced for further information about CatBoost.…”
Section: Categorical Boosting (Catboost)mentioning
confidence: 99%
“…Many studies have pointed out that ultrasonic vibration-assisted machining (UVM) technology and non-resonant vibration-assisted machining (NVM) technology can reduce force and surface damage by changing the motion path of the abrasive or tool [ 7 , 8 , 9 ]. Vibration-assisted machining technology based on ultrasonic vibration devices improves surface quality and surface integrity by making abrasive or tools hit the workpiece surface at high frequency [ 10 ]. This technique has received much attention [ 11 , 12 , 13 ].…”
Section: Introductionmentioning
confidence: 99%