Drag Force Actuated Bistable Microswitches for Flow Sensing

Kuipers, Winfred; Baar, J.J. van; Dijkstra, Marcel; Wiegerink, Remco J.; Lammerink, Theodorus S.J.; Boer, J. H. de; Krijnen, Gijs

doi:10.1109/memsys.2006.1627885

Cited by 4 publications

(4 citation statements)

References 9 publications

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“…Several types of biomimetic flow-sensors can be found in literature incorporating various transduction mechanisms. These include piezoresistive sensing [3], capacitive sensing [4] and switching [5]. This paper describes the successful continuation of the fabrication and design of flow-sensor arrays with capacitive sensing [4] for reasons of high intrinsic sensitivity in combination with low power dissipation and promising performance.…”

Section: Figure 1: (A) Photograph Of the Acheta Domesticus And (Bc) mentioning

confidence: 99%

Advancements in Technology and Design of Biomimetic Flow-Sensor Arrays

Bruinink

Jaganatharaja

Boer

et al. 2009

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems

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This paper reports on recent developments to increase the performance of biomimetic flow-sensor arrays by means of several technological advancements in the fabrication procedures and corresponding sensor design optimizations. Advancements include fabrication procedures with higher process latitude and geometrical modifications of several parts of the flow sensor. The conclusive measurements in this paper support our sensormodel predictions for a 100-fold increase in acoustic sensitivity (down to oscillating flow amplitudes in the order of 1 mm⋅s-1) translating to substantially higher capacitive outputs in comparison to our first-generation biomimetic flow-sensor arrays.

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Section: Figure 1: (A) Photograph Of the Acheta Domesticus And (Bc) mentioning

confidence: 99%

Advancements in Technology and Design of Biomimetic Flow-Sensor Arrays

Bruinink

Jaganatharaja

Boer

et al. 2009

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems

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“…bistable switches (figure 11). The latter have the advantage of relative easy resistive read-out [21].…”

Section: Artificial Hairs As a Model Systemmentioning

confidence: 99%

MEMS based hair flow-sensors as model systems for acoustic perception studies

et al. 2006

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Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets, have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on the membrane and on the substrate form variable capacitors allowing for capacitive read-out. Capacitance versus voltage, frequency dependency and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept. The sensors form a model-system allowing for investigations on sensory acoustics by their arrayed nature, their adaptivity via electrostatic interaction (frequency tuning and parametric amplification) and their susceptibility to noise (stochastic resonance)

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“…Several research groups have focused on bistable MEMS, using either residual stress [13], buckled beams [14], [15], initially curved beams [16] or electrostatic forcing [17]. In this work, electrostatic forces are used to obtain bistability in our slider.…”

Section: Introductionmentioning

confidence: 99%

Stochastic Resonance in a Voltage-Controlled Micromechanical Slider

Droogendijk

Boer

Sanders

et al. 2015

J. Microelectromech. Syst.

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Stochastic resonance (SR) is a phenomenon that has been extensively investigated theoretically, but which is much harder to study experimentally. In this paper, we report on an experimental micromechanical slider structure that allows for full control of most of the parameters that are of importance for the occurrence of SR. Using a silicon-on-insulator-based process, we realized a slider structure with periodic capacitive structures to obtain tunable unstable regions. We implemented stochastic resonance by controlling the strength of these capacitive wells by a dc-bias voltage, operating the device in push-pull mode by electrostatic actuation, and adding a judiciously amount of white noise to the actuation comb drives. It is shown that this SR scheme allows for detection of subthreshold forces. We find that the amount of noise needed for optimal SR depends strongly on the noise bandwidth. Further, we demonstrate that the implementation of SR in a slider allows for improved detection of both sinusoidal and triangular waveforms, but that the performance of SR deteriorates for square waveforms.[2014-0083] where he is currently a Senior Technologist. His current research interests include silicon micromachining and related fabrication techniques, with a focus on deep reactive ion etching techniques. He has published over 112 reviewed journal papers on micro (nano) technology and related topics, and holds 10 patent applications. . His research interests include design and fabrication of measurement techniques and setups for a wide range of MEMS structures and microscale chemical reactors. Gijs J. M. Krijnen received the M.Sc. degree in electrical engineering and the Ph.D. degree from the

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Drag Force Actuated Bistable Microswitches for Flow Sensing

Cited by 4 publications

References 9 publications

Advancements in Technology and Design of Biomimetic Flow-Sensor Arrays

Advancements in Technology and Design of Biomimetic Flow-Sensor Arrays

MEMS based hair flow-sensors as model systems for acoustic perception studies

Stochastic Resonance in a Voltage-Controlled Micromechanical Slider

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